Optical Instruments, Volume. 41, Issue 6, 40(2019)

Fabrication of copper-based SERS substrates by magnetron sputtering

Yu HE1... Qiang LI1, Ling ZHANG2,*, Deng PAN3 and Qun SUN2 |Show fewer author(s)
Author Affiliations
  • 1School of Mechanical Engineering, University of Shanghai for Science and Technology, Shanghai 200093, China
  • 2School of Optical-Electrical and Computer Engineering, University of Shanghai for Science and Technology, Shanghai 200093, China
  • 3Materials Genome Institute of Shanghai University,Shanghai 200041,China
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    Figures & Tables(6)
    SEM images of surfaces for different sputtering parameters.
    SEM images of Cu-Ti thin films after dealloying
    SEM images of different sputtering parameters after dealloying for 2 hours
    SERS spectra of different dealloying time and different sputtering parameter(counts represents spectra intensity)
    • Table 1. EDS results of films prepared by magnetron sputtering

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      Table 1. EDS results of films prepared by magnetron sputtering

      溅射参数Cu含量/%Ti含量/%O含量/%
      射频 150 W52.4742.624.91
      射频 200 W52.9943.713.30
      射频 250 W48.4638.8512.49
      直流 150 W53.9842.373.65
      直流 200 W53.6942.643.67
      直流 250 W51.4340.977.60
    • Table 2. SERS enhance factor of different films after dealloying for 2 h

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      Table 2. SERS enhance factor of different films after dealloying for 2 h

      参数平均增强因子
      射频 150 W6.9×106
      射频 200 W1.8×107
      射频 250 W4.2×106
      直流 150 W8.3×106
      直流 200 W6.2×106
      直流 250 W4.2×106
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    Yu HE, Qiang LI, Ling ZHANG, Deng PAN, Qun SUN. Fabrication of copper-based SERS substrates by magnetron sputtering[J]. Optical Instruments, 2019, 41(6): 40

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    Paper Information

    Category: DESIGN AND RESEARCH

    Received: Mar. 30, 2019

    Accepted: --

    Published Online: May. 19, 2020

    The Author Email: ZHANG Ling (lzhang@usst.edu.cn)

    DOI:10.3969/j.issn.1005-5630.2019.06.007

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