Acta Optica Sinica, Volume. 25, Issue 6, 791(2005)
Study on Fast Ultra-Precision Measurement Model in Laser Heterodyne Interferometry
[2] [2] Mark L. Schattenburg, Henry I. Smith. The critical role of metrology in nanotechnology[C]. Proc. SPIE, 2002, 4608: 116~124
[6] [6] Frank C. Demarest. High-resolution, high-speed, low data age uncertainty, heterodyne displacement measuring interferometer electronics[J]. Meas. Sci. Technol., 1998, 9(7): 1024~1030
[8] [8] Attilio Sacconi, Gian Bartolo Picotto, Walter Pasin. The IMGC calibration setup for micro displacement actuators[J]. IEEE Transactions on Instrumentation and Measurement, 1999, 48(2): 483~487
[9] [9] R. K. Heilmann, P. T. Konkola, C. G. Chen et al.. Relativistic corrections in displacement measuring interferometry[J]. J. Vac. Sci. Technol., 2000, B18(6): 3277~3281
[10] [10] TaeBong Eom, TaeYoung Choi, KeonHee Lee et al.. A simple method for the compensation of the nonlinearity in the heterodyne interferometer[J]. Measurement Science and Technol., 2002, 13(2): 222~225
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[in Chinese], [in Chinese], [in Chinese], [in Chinese]. Study on Fast Ultra-Precision Measurement Model in Laser Heterodyne Interferometry[J]. Acta Optica Sinica, 2005, 25(6): 791