Optics and Precision Engineering, Volume. 18, Issue 7, 1536(2010)

Fabrication of ultraviolet holographic blazed grating

Tan Xin*... Li Wen-hao, Bayanheshig and QI Xiang-dong |Show fewer author(s)
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    References(13)

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    [4] [4] OSTERRIED K,HEIDEMANN K F,NELLES B. Groove profile modification of blazed gratings by dip coating with hardenable liquids[J]. Appl. Opt. 1998,50(37):8002-8007.

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    [6] [6] LIN H, LI L F. Fabrication of extreme-ultraviolet blazed gratings by use of direct argon–oxygen ion-beam etching through a rectangular photoresist mask[J]. Appl. Opt.2008,50(47):6212-6218.

    [7] [7] ZHAO B , QI X D. Manufacturing of high efficient holographic diffraction gratings[J]. Opt. Precision Eng.,2001,9(2):109-114. (in Chinese)

    [8] [8] HUTLEY M C. Diffraction Gratings[M].America Academic, 1982.

    [9] [9] TAN X, LIU Y, LIU ZH K. Performance of a soft X-ray splitter grating parallelism measuring system by diffraction method[J]. Journal of Functional Materials and Devices, 2009,17(15):61-65.

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    CLP Journals

    [1] Cui Jinjiang, Kong Peng, Wang Fan, Tan Huiming. Analysis and Control of Groove Density Error for the Rowland Holographic Grating[J]. Laser & Optoelectronics Progress, 2013, 50(2): 20901

    [2] LIANG Ju-xi, ZHENG Yan-chang, QIU Ke-qiang, LIU Zheng-kun, XU Xiang-dong, HONG Yi-lin. Calibration method of silicon 〈111〉 orientation and its application in fabrication of silicon grating by anisotropic wet etching[J]. Optics and Precision Engineering, 2018, 26(1): 1

    [3] Jiao Qingbin, Bayanheshig, Tan Xin, Li Yanru, Zhu Jiwei, Wu Na. Effects of Ultrasonic Vibration and Wettability Enhancement on Surface Roughness on Blaze Plane of Silicon Echelon Grating[J]. Acta Optica Sinica, 2014, 34(3): 305001

    [4] HAN Jian, Bayanheshig, LI Wen-hao, KONG Peng. Groove profile evolution of grating masks for different photoresist response curves in fabrication of holographic gratings[J]. Optics and Precision Engineering, 2012, 20(11): 2380

    [5] WU Na, TAN Xin, Bayanheshig, TANG Yu-guo. Simulation and experiments of ion beam etching process for blazed holographic grating[J]. Optics and Precision Engineering, 2012, 20(9): 1904

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    Tan Xin, Li Wen-hao, Bayanheshig, QI Xiang-dong. Fabrication of ultraviolet holographic blazed grating[J]. Optics and Precision Engineering, 2010, 18(7): 1536

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    Paper Information

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    Received: Dec. 9, 2009

    Accepted: --

    Published Online: Dec. 7, 2010

    The Author Email: Xin Tan (xintan.grating@gmail.com)

    DOI:

    CSTR:32186.14.

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