Acta Optica Sinica, Volume. 18, Issue 6, 688(1998)

Application of Point Diffraction Interferometer in Scanning Force Microscope

[in Chinese], [in Chinese], [in Chinese], and [in Chinese]
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    References(10)

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    [3] [3] Y. Martin, C. C. Williams, H. K. Wickramsinghe. Atomic force microscopy-force mapping and profile on a sub 10 nm scale. J. Appl. Phys., 1987, 61(2): 4723~4729

    [4] [4] W. H. Huang, A. M. Baro, J. J. Sanez. Electrostatic and contact forces in force microscopy. J. Vac. Sci. Technol., 1991, B9(2): 1323~1328

    [5] [5] C. Philip, D. Hobbs, W. DavidAbraham et al.. Magnetic force microscopy with 25 nm resolution. Appl. Phys. Lett., 1989, 55(22): 2357~2359

    [6] [6] G. Meyer, N. M. Amer. Erratum: Novel optical approach to atomic force nicroscopy. Appl. Phys. Lett., 1988, 53(6): 1045~1049

    [7] [7] Minoru Sasaki, Kazuhiro Hane, Shigeru Okuma. Shape of the cantilever deflection for the atomic force microscope in force curve measurement. Rev. Sci. Instrum., 1994, 65(6): 1930~1935

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    [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Application of Point Diffraction Interferometer in Scanning Force Microscope[J]. Acta Optica Sinica, 1998, 18(6): 688

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    Paper Information

    Category: Optical Design and Fabrication

    Received: May. 2, 1997

    Accepted: --

    Published Online: Oct. 18, 2006

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