Acta Optica Sinica, Volume. 18, Issue 6, 688(1998)
Application of Point Diffraction Interferometer in Scanning Force Microscope
A new optical interferometer suitable for using in the scanning force microscope is presented. The cantilever itself is used as a micro interferometer element. The deflection of the cantilever is detected by the interference between the geometrical reflected wave and the backward diffracted wave. This interferometer has a simple structure, fewer optical components, low cost, and common light path. 0.01 nm vertical resolution is obtained by this instrument.
Get Citation
Copy Citation Text
[in Chinese], [in Chinese], [in Chinese], [in Chinese]. Application of Point Diffraction Interferometer in Scanning Force Microscope[J]. Acta Optica Sinica, 1998, 18(6): 688