Optics and Precision Engineering, Volume. 17, Issue 3, 513(2009)

Micro theoretical model for grinding SiC mirror with fixed abrasive

WANG Xu1...2,* and ZHANG Xue-jun12 |Show fewer author(s)
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
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    References(9)

    [1] [1] MARK A E,GERALD Q W.Developmental history and trends for reaction bonded silicon carbide mirrors[J].SPIE,1996,2857,66-72.

    [2] [2] ZHAO Y W,CHANG L.A micro-contact and wear model for chemical-mechanical polishing of silicon wafers[J].Wear,2002,252:220-226.

    [3] [3] RABINOWICZ E.Friction and Wear of Materials[M]. 2nd ed. Wiley, New York,1995.

    [5] [5] TAM H Y,CHENG H B,WANG Y W.Removal rate and surface roughness in the lapping and polishing of RB-SiC optical components [C].Journal of Materials Processing Technology,2007:192-193,276-280.

    [6] [6] ZHANG X J,ZHANG Y F,YU J CH, et al.. FSGJ-1 system of asphere automaking and on-line testing[J].Opt.Precision Eng., 1997,5(2):70-76.(in Chinese)

    [8] [8] YANG J D,TIAN C L. High Spedd Lapping Technology[M]. Beijing:National Defense Industry Press,2003.(in Chinese)

    [9] [9] EDWARDS D F,HED P P.Optical glass fabrication technology.1:Fine grinding mechanism using bound diamond abrasives[J]. Applied Optics,1987,26(21):4670-4676

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    [2] WANG Yong-gang, CUI Tian-gang, MA Wen-sheng, CHEN Bin, CHEN Bo. Removal function for fabrication of WolterⅠgrazing mirror by elastic ball tool[J]. Optics and Precision Engineering, 2011, 19(1): 10

    [3] WANG Yong-gang, CUI Tian-gang, MA Wen-sheng, CHEN Bin, CHEN Bo. Fabrication of Wolter-I grazing mirror[J]. Optics and Precision Engineering, 2011, 19(4): 743

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    WANG Xu, ZHANG Xue-jun. Micro theoretical model for grinding SiC mirror with fixed abrasive[J]. Optics and Precision Engineering, 2009, 17(3): 513

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    Paper Information

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    Received: Jun. 4, 2008

    Accepted: --

    Published Online: Oct. 28, 2009

    The Author Email: Xu WANG (wangxu-308@163.com)

    DOI:

    CSTR:32186.14.

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