Optics and Precision Engineering, Volume. 12, Issue 2, 231(2004)
[in Chinese]
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[4] [4] IHLEMANN J, RRBAHN K. Excimer laser micro machining: fabrication and applications of dielectric masks[J].Applied Surface Science, 2000,587-592.
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[in Chinese], [in Chinese], [in Chinese]. [J]. Optics and Precision Engineering, 2004, 12(2): 231