Acta Optica Sinica, Volume. 17, Issue 2, 216(1997)
Study on the Exposure Characteristics of Prehardened DCG Used as Photoresist to Resist Enzyme Etching
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[in Chinese], [in Chinese], [in Chinese], [in Chinese]. Study on the Exposure Characteristics of Prehardened DCG Used as Photoresist to Resist Enzyme Etching[J]. Acta Optica Sinica, 1997, 17(2): 216