Acta Optica Sinica, Volume. 17, Issue 2, 216(1997)
Study on the Exposure Characteristics of Prehardened DCG Used as Photoresist to Resist Enzyme Etching
The exposure characteristics of prehardened dichromate gelatin (DCG) used as photoresist to resist enzyme etching are presented herein. The experimental results and the effect of three primary factors on the exposure characteristics are discussed.
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[in Chinese], [in Chinese], [in Chinese], [in Chinese]. Study on the Exposure Characteristics of Prehardened DCG Used as Photoresist to Resist Enzyme Etching[J]. Acta Optica Sinica, 1997, 17(2): 216