Optics and Precision Engineering, Volume. 13, Issue 3, 291(2005)

[in Chinese]

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    References(5)

    [1] [1] NEC/TOKIN. Multilayer piezoelectric actuators[M]. NEC TOKIN Corporation,Japan. 2004.

    [3] [3] SHAMOTO E, MORIWAKI T. Development of a walking drive ultraprecision positioner[J].Precision Engineer, 1997,20 (2) : 85-92.

    [4] [4] LIU Y T,WANG C W. A self-moving precision positioning stage utilizing impact force of springmounted piezoelectric actuator[J]. Sensors and Actuators A , 2002,102 : 83-92.

    [5] [5] ZHU Z,ZHANG B A. Linear piezomotor integrated by a monolithic flexural frame[J]. Trans ASME J Mech Des. , 1997;119:14-7.

    [9] [9] TENZER P E, MRAD R B. On amplification in inchworm precision positioners[J]. Mechatronics, 2004,14:515-531

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    Paper Information

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    Received: Feb. 6, 2005

    Accepted: --

    Published Online: Nov. 3, 2006

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