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INFRARED, Volume. 44, Issue 4, 1(2023)

Study on Dry/Wet Etching Preparationof InAs/GaSb Type-II Superlattice Dual-Color

Tao WEN, Yu-nong HU1, Jing-feng LI1, Cheng-cheng ZHAO1, Guo-Wei WANG2, and LIU MingInfrared Focal Plane Devices 1
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    WEN Tao, HU Yu-nong, LI Jing-feng, ZHAO Cheng-cheng, WANG Guo-Wei, LIU MingInfrared Focal Plane Devices. Study on Dry/Wet Etching Preparationof InAs/GaSb Type-II Superlattice Dual-Color[J]. INFRARED, 2023, 44(4): 1

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    Received: Oct. 31, 2022

    Accepted: --

    Published Online: Jan. 15, 2024

    The Author Email:

    DOI:10.3969/j.issn.1672-8785.2023.04.001

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology