Acta Photonica Sinica, Volume. 52, Issue 6, 0612001(2023)
High-precision Measurement for a Quantum Dot Encoder Based on Triangular-wave Skeleton Extraction of Coding Patterns
Figures & Tables(14)
Fig. 1. Displacement measurement principle of quantum dot encoder［31］
Table 1. Hardware and software environment configurations of the displacement measurement method
View tableView in ArticleTable 1. Hardware and software environment configurations of the displacement measurement method
Equipment and software Parameters CPU AMD Ryzen 7 5800 8-Core 3.40 GHz GPU NVIDIA GeForce RTX 3060 12 GB Operating system Windows 10 OpenCV 4.0.1 Python 3.6
Table 2. Comparisons of fitting results via different waveforms
View tableView in ArticleTable 2. Comparisons of fitting results via different waveforms
Waveform RMSE/pixel Amplitude/pixel Square wave 106.24 73 Sine wave 37.99 171 Triangular wave 38.49 207
Table 3. Comparisons of error compensation for the quantum dot encoder via different neural networks
View tableView in ArticleTable 3. Comparisons of error compensation for the quantum dot encoder via different neural networks
Method RMSE/μm Max error/μm Variance/μm2 CI BPNN 11.562 21.543 36.617 ［-23.568，6.0183］ LSTM 21.920 48.190 133.512 ［-15.499，46.129］ RBFNN 0.551 0.988 0.183 ［-1.193，0.885］
Table 4. Ablation experiments
View tableView in ArticleTable 4. Ablation experiments
Method RMSE/μm Max error/μm Rep error/μm Variance/μm2 CI Running time/ms Pre ［ 31 ］10.166 30.1745 ±8.695 41.49 ［-20.875，18.813］ 42.13 Pre+BTVS 18.142 54.800 ±33.476 135.838 ［-39.243，16.989］ 20.17 Pre+TWSE 6.352 19.741 ±0.870 14.853 ［-12.568，2.410］ 46.17 Pre+RBFNN 3.488 16.426 ±13.395 6.336 ［-7.008，6.668］ 43.35 Ours 0.551 0.988 ±0.870 0.183 ［-1.193，0.885］ 24.32
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Zhiliang WU, Nian CAI, Weicheng OU, Xiaona CHEN, Han WANG. High-precision Measurement for a Quantum Dot Encoder Based on Triangular-wave Skeleton Extraction of Coding Patterns[J]. Acta Photonica Sinica, 2023, 52(6): 0612001
Paper Information
Category: Instrumentation, Measurement and Metrology
Received: Dec. 22, 2022
Accepted: Feb. 20, 2023
Published Online: Jul. 27, 2023
The Author Email: CAI Nian (cainian@gdut.edu.cn)
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