Fig. 1. Ion beam polishing principle

Fig. 2. Remove the two-dimensional schematic diagram of the function

Fig. 3. Change of material removal efficiency with spatial frequency f under different removal function beam diameter

Fig. 4. Volume removal rate and beam diameter of different experimental groups

Fig. 5. Fitted removal function model

Fig. 6. Etching curve corresponding to the experimental results of single point etching and the sampling line

Fig. 7. Fitted removal function model

Fig. 8. Initial polygon diagram

Fig. 9. Measurement results of large beam diameter machining

Fig. 10. Measurement results of small beam diameter machining