Photonics Research, Volume. 8, Issue 2, 194(2020)
3D integrated photonics platform with deterministic geometry control Editors' Pick
Jérôme Michon1、*, Sarah Geiger1,2, Lan Li3,4, Claudia Goncalves5, Hongtao Lin6, Kathleen Richardson5, Xinqiao Jia2,7, and Juejun Hu1,8
Author Affiliations
1Department of Materials Science and Engineering, Massachusetts Institute of Technology, Cambridge, Massachusetts 02139, USA2Department of Biological Engineering, University of Delaware, Newark, Delaware 19716, USA3Key Laboratory of 3D Micro/Nano Fabrication and Characterization of Zhejiang Province, School of Engineering, Westlake University, Hangzhou 310024, China4Institute of Advanced Technology, Westlake Institute for Advanced Study, Hangzhou 310024, China5College of Optics & Photonics, University of Central Florida, Orlando, Florida 32816, USA6College of Information Science and Electronic Engineering, Zhejiang University, Hangzhou 310027, China7e-mail: xjia@udel.edu8e-mail: hujuejun@mit.edushow less
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