Key Technologies of Quadri-Wave Lateral Shearing Interferometer

Ke Liu; Xiaotian Zhang; Hui Zhong; Fei He; Shuhao Liu; Yanqiu Li

doi:10.3788/AOS230738

Acta Optica Sinica, Volume. 43, Issue 15, 1512001(2023)

Key Technologies of Quadri-Wave Lateral Shearing Interferometer

Ke Liu^*, Xiaotian Zhang, Hui Zhong, Fei He, Shuhao Liu, and Yanqiu Li^**

Key Laboratory of Optoelectronic Imaging Technology and System, Ministry of Education, School of Optics and Photonics, Beijing Institute of Technology, Beijing 100081, China

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Ke Liu, Xiaotian Zhang, Hui Zhong, Fei He, Shuhao Liu, Yanqiu Li. Key Technologies of Quadri-Wave Lateral Shearing Interferometer[J]. Acta Optica Sinica, 2023, 43(15): 1512001

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Paper Information

Category: Instrumentation, Measurement and Metrology

Received: Mar. 29, 2023

Accepted: May. 5, 2023

Published Online: Aug. 3, 2023

The Author Email: Liu Ke (liuke@bit.edu.cn), Li Yanqiu (liyanqiu@bit.edu.cn)

DOI:10.3788/AOS230738

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Instrumentation, Measurement and Metrology