Chinese Optics Letters, Volume. 4, Issue 3, 03128(2006)

A piezoresistive micro-cantilever for thermal infrared detector

Jintao Liang1、*, Junhua Liu1, Xin Li2, and Changchun Zhu2
Author Affiliations
  • 1School of Electrical Engineering, Xi'an Jiaotong University, Xi'an 710049
  • 2School of Electronics and Information Engineering, Xi'an Jiaotong University, Xi'an 710049
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    References(12)

    [1] [1] L. R. Senesac, J. L. Corbeil, S. Rajic, N. V. Lavrik, and P. G. Datskos, Ultramicroscopy 97, 451 (2003).

    [2] [2] J.-K. Kim and C.-H. Han, Sensors and Actuators A 89, 22 (2001).

    [3] [3] A. Vidic, D. Then, and Ch. Ziegler, Ultramicroscopy 97, 407 (2003).

    [4] [4] A. Rogalski, Infrared Phys. Technol. 43, 187 (2002).

    [5] [5] J. Yang, T. Ono, and M. Esashi, Sensors and Actuators A 82, 102 (2000).

    [6] [6] W. Fang, H.-C. Tsai, and C.-Y. Lo, Sensors and Actuators A 77, 21 (1999).

    [9] [9] H. Hu, Z. Jing, and S. Hu, Chin. Opt. Lett. 3, 322 (2004).

    [10] [10] O. Nakabeppu, M. Chandrachood, Y. Wu, J. Lai, and A. Majumdar, Appl. Phys. Lett. 66, 694 (1995).

    [11] [11] W. Lang, K. Kuhl, and H. Sandmaier, Sensors and Actuators A 34, 243 (1992).

    [12] [12] Y.-F. Liu, Z.-M. Shen, Y. Kiyoshi, B.-H. Ma, and J.-M. Yu, New Carbon Materials (in Chinese) 19, 197 (2004).

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    [1] [in Chinese], [in Chinese]. Polarization-Independent Bidirectional 3×3 Optical Switch[J]. Acta Optica Sinica, 2007, 27(7): 1279

    [2] Li Hongqi, Wang Huimin. A Method of Measuring Quality Factor and Reverse Saturated Current of Photovoltaic Detector PN Junction[J]. Chinese Journal of Lasers, 2008, 35(s1): 69

    [3] Jiang Zhen, Wang Tao, Wang Bing, Li Gang. Transient Characteristics in All-Optical Switching Using Electron Spin Relaxation[J]. Acta Optica Sinica, 2008, 28(7): 1374

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    Jintao Liang, Junhua Liu, Xin Li, Changchun Zhu. A piezoresistive micro-cantilever for thermal infrared detector[J]. Chinese Optics Letters, 2006, 4(3): 03128

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    Paper Information

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    Received: Jun. 8, 2005

    Accepted: --

    Published Online: Jun. 6, 2006

    The Author Email: Jintao Liang (dxljt@163.com)

    DOI:

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