Structure and Luminescence Properties in Tb<sup>3+</sup> and Pr<sup>3+</sup> Doped AlN Films

Hechen MENG; Xuan LUO; Xiaodan WANG; Da XU; Zhengdong SHU; Xionghui ZENG; Xiaodong GAO; Shunan ZHENG; Hongmin MAO

doi:10.3788/gzxb20255402.0231003

Acta Photonica Sinica, Volume. 54, Issue 2, 0231003(2025)

Structure and Luminescence Properties in Tb³⁺ and Pr³⁺ Doped AlN Films

Hechen MENG1... Xuan LUO1, Xiaodan WANG1,*, Da XU1, Zhengdong SHU1, Xionghui ZENG2,**, Xiaodong GAO2, Shunan ZHENG2 and Hongmin MAO1 |Show fewer author(s)

Author Affiliations

¹Key Laboratory of Efficient Low-carbon Energy Conversion and Utilization of Jiangsu Provincial Higher Education Institutions， School of Mathematics and Physics， Suzhou University of Science and Technology， Suzhou 215009， China

²Suzhou Institute of Nano-Tech and Nano-Bionics， Chinese Academy of Sciences， Suzhou 215123， China

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Figures & Tables(8)

Fig. 1. Raman spectra of implanted AlN films

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Fig. 2. X-ray rocking curve of AlN thin film （0002） crystal plane before and after ion implantation

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Fig. 3. CL spectra of AlN with different dosages of Tb³⁺and Pr³⁺ implanted and the variation trend of integrated intensities of emission peak of Tb³⁺and Pr³⁺

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Fig. 4. Energy transfer mechanism in the Tb³⁺ and Pr³⁺

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Fig. 6. The CIE chromaticity diagram of the Tb³⁺ and Pr³⁺co- doped AlN films

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Table 1. Parameters of ion implantation dose in AlN∶ Tb³⁺ and AlN∶ Tb³⁺， Pr³⁺ samples
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Table 1. Parameters of ion implantation dose in AlN∶ Tb³⁺ and AlN∶ Tb³⁺， Pr³⁺ samples
Sample Tb³⁺/（at·cm^-2） Pr³⁺/（at·cm^-2）
AlN： Tb³⁺ 1×10¹⁴ —
AlN： Tb³⁺， Pr³⁺ 1×10¹⁴ 1×10¹⁴
AlN： Tb³⁺， Pr³⁺ 1×10¹⁴ 5×10¹⁴
AlN： Tb³⁺， Pr³⁺ 1×10¹⁴ 1×10¹⁵

Table 2. Calculation results of average injection dose C_pand critical distance R_c
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Table 2. Calculation results of average injection dose C_pand critical distance R_c
Tb³⁺/（at·cm^-2） Pr³⁺/（at·cm^-2） C_p/（%， atom fraction） R_c/nm
1×10¹⁴ 1×10¹⁴ 0.121 86 3.199 18
1×10¹⁴ 5×10¹⁴ 0.364 69 2.219 99
1×10¹⁴ 1×10¹⁵ 0.666 57 1.815 71

Table 3. Luminescent chromaticity coordinates and color temperature of AlN with different doses of Tb³⁺and Pr³⁺ions co- doped
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Table 3. Luminescent chromaticity coordinates and color temperature of AlN with different doses of Tb³⁺and Pr³⁺ions co- doped
Tb³⁺/（ at·cm^-2） Pr³⁺/（ at·cm^-2） CIE co-ordinates CCT/K
x y
1×10¹⁴ 1×10¹⁴ 0.268 2 0.305 0 10 260.795 77
1×10¹⁴ 5×10¹⁴ 0.299 4 0.324 0 7 336.240 843
1×10¹⁴ 1×10¹⁵ 0.293 7 0.321 0 7 755.657 616

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Hechen MENG, Xuan LUO, Xiaodan WANG, Da XU, Zhengdong SHU, Xionghui ZENG, Xiaodong GAO, Shunan ZHENG, Hongmin MAO. Structure and Luminescence Properties in Tb³⁺ and Pr³⁺ Doped AlN Films[J]. Acta Photonica Sinica, 2025, 54(2): 0231003

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Paper Information

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Received: Jul. 23, 2024

Accepted: Sep. 9, 2024

Published Online: Mar. 25, 2025

The Author Email: WANG Xiaodan (xiaodanwang@mail.usts), ZENG Xionghui (xhzeng2007@sinano.ac.cn)

DOI:10.3788/gzxb20255402.0231003

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology

Table 1. Parameters of ion implantation dose in AlN∶ Tb3+ and AlN∶ Tb3+， Pr3+ samples

Table 1. Parameters of ion implantation dose in AlN∶ Tb3+ and AlN∶ Tb3+， Pr3+ samples

Table 2. Calculation results of average injection dose Cpand critical distance Rc

Table 2. Calculation results of average injection dose Cpand critical distance Rc

Table 3. Luminescent chromaticity coordinates and color temperature of AlN with different doses of Tb3+and Pr3+ions co- doped

Table 3. Luminescent chromaticity coordinates and color temperature of AlN with different doses of Tb3+and Pr3+ions co- doped

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Table 1. Parameters of ion implantation dose in AlN∶ Tb³⁺ and AlN∶ Tb³⁺， Pr³⁺ samples

Table 1. Parameters of ion implantation dose in AlN∶ Tb³⁺ and AlN∶ Tb³⁺， Pr³⁺ samples

Table 2. Calculation results of average injection dose C_pand critical distance R_c

Table 2. Calculation results of average injection dose C_pand critical distance R_c

Table 3. Luminescent chromaticity coordinates and color temperature of AlN with different doses of Tb³⁺and Pr³⁺ions co- doped

Table 3. Luminescent chromaticity coordinates and color temperature of AlN with different doses of Tb³⁺and Pr³⁺ions co- doped