Analysis of Diffraction Effect in Phase Shifting Microscopic Interferometry

[in Chinese]; [in Chinese]; [in Chinese]

Acta Optica Sinica, Volume. 18, Issue 7, 877(1998)

[in Chinese], [in Chinese], and [in Chinese]

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[in Chinese]

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References(4)

[1] [1] K. Creath. Phase-measurement interferometry techniques. In: E. Wolfed. Progressin Optics, XXVI. Amsterdam: Elsevier Science Publishers, 1988. 351～393

[2] [2] J. Schwider. Advanced evaluation techniques in interferometry. In E. Wolfed. Progressin Optics, XXIX. Amsterdam: Elsevier Science Publishers, 1990. 271～359

[3] [3] J. C. Wyant. How to extend interferometry for rough-surface tests. Laser Focus World, 1993, 29(5): 131～133

[4] [4] G. S. Kino, S. S. C. Chim. Mirau Correlation microscope. Appl. Opt., 1990, 29(26): 3775～378

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[in Chinese], [in Chinese], [in Chinese]. Analysis of Diffraction Effect in Phase Shifting Microscopic Interferometry[J]. Acta Optica Sinica, 1998, 18(7): 877

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Paper Information

Category: Diffraction and Gratings

Received: Apr. 9, 1997

Accepted: --

Published Online: Oct. 18, 2006

The Author Email:

DOI:

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology