Acta Optica Sinica, Volume. 18, Issue 7, 877(1998)
Analysis of Diffraction Effect in Phase Shifting Microscopic Interferometry
In the phase shifting microscopic interferometry profiler, surface profile distortion exists due to the limitation of finite spatial bandwidth of the microscopic system. The phenomenon through simulation computation was analyzed. A suggestion to improve the response of the system was given.
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[in Chinese], [in Chinese], [in Chinese]. Analysis of Diffraction Effect in Phase Shifting Microscopic Interferometry[J]. Acta Optica Sinica, 1998, 18(7): 877
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