Optics and Precision Engineering, Volume. 27, Issue 11, 2402(2019)
Adhesive mounting deformation of ultra-thin quartz workpiece in polishing
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ZHOU Ping, WANG Ze-hong, HAN Xiao-long, JIN Zhu-ji. Adhesive mounting deformation of ultra-thin quartz workpiece in polishing[J]. Optics and Precision Engineering, 2019, 27(11): 2402
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Received: Mar. 26, 2019
Accepted: --
Published Online: Jan. 7, 2020
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