Acta Photonica Sinica, Volume. 50, Issue 10, 1004001(2021)
High-performance Solar-blind and X-ray Detector Based on Ultra-thin Gallium Oxide Film Grown by MOCVD（Invited）
Figures & Tables(8)
Fig. 4. Various parameters as a function of different light intensities and voltages
Fig. 5. I-t curve and respond time of MSM Ga2O3 PD under different conditions
Table 1. Performance of Ga2O3 SBUV PD grown by different methods
View tableView in ArticleTable 1. Performance of Ga2O3 SBUV PD grown by different methods
Material Method Thickness
d/nm
PDCR （PDCR/d）/
nm-1
R/
（A·W-1）
（R/d）/
（A·W-1·nm-1）
D*/Jones （D*/d）/（Jones·nm-1） Ref. β-Ga2O3
film
MOCVD 70 5.5×107 7.9×105 72.2 1.03 4.7×1015 6.7×1013 This work ε-Ga2O3
film
MOCVD 1 000 1.7×105 170 230 0.23 1.2×1015 1.2×1012 ［ 18 ］ε-Ga2O3
film
MOCVD 508 1.8×104 35 0.5 10-3 1.67×1013 3.3×1010 ［ 19 ］β-Ga2O3
Nanowire
HVPE 800 9.4×103 12 0.1 1.53×10-4 4.4×1011 5.5×108 ［ 20 ］β-Ga2O3 film mist CVD 600 1.5×105 2.5×102 22 000 36.67 1.1×1016 1.8×1013 ［ 10 ］β-Ga2O3 film mist CVD 500 105 2×102 150 0.3 N/A N/A ［ 9 ］β-Ga2O3 film PLD 383 2.5×103 7 0.3 8.62×10-4 N/A N/A ［ 8 ］β-Ga2O3 micro-flake PLD 300 1.9×103 6 1.7 5.67×10-3 3.7×1010 1.2×10-2 ［ 29 ］β-Ga2O3 film RFMS 200 105 5×102 52.6 0.26 N/A N/A ［ 23 ］Cr-doped Ga2O3 flakes MF 142 8×105 563 4.8×105 3.38×103 6.7×1014 4.7×1012 ［ 24 ］β-Ga2O3 MF 280 6×106 2.1×104 2.6×103 9.28 9.7×1013 3.5×1011 ［ 22 ］β-Ga2O3 film MF 80 4.56 6×10-2 1.8×105 2250 7.1×1011 9×109 ［ 21 ］β-Ga2O3 microwire MF 107 4.1×104 4.1×10-3 1.3×10-2 1.3×10-9 9.4×1011 9.4×104 ［ 14 ］
Table 2. Equivalent thickness sensitivity of different X-ray detectors
View tableView in ArticleTable 2. Equivalent thickness sensitivity of different X-ray detectors
Material Thickness
d/μm
Sensitivity
S/（μC·cm-2·Gy-1）
（S/d）/
（μC·cm-3·Gy-1）
X-ray energy/keV Ref. β-Ga2O3 7×10-2 1.91×104 2.72×109 60 This work amorphous Ga2O3 0.25 6.77 2.71×105 40 ［ 34 ］ε-Ga2O3 0.4 1.9×104 4.75×108 30 ［ 42 ］β-Ga2O3：Mg 1 000 338.9 3.40×103 16 ［ 35 ］MAPbBr3 2 000 80 400 50 ［ 5 ］CH3NH3PbI3 0.6 1.5 25 000 8 ［ 43 ］α-Se 200 20 1 000 20 ［ 31 ］CsPbBr3 1 000 17.7 177 2.5 ［ 44 ］Cs2AgBiBr6 100 40 4 000 <45 ［ 45 ］GaN 356 0.17 5 30 ［ 3 ］
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Tiansheng ZHONG, Shunjie YU, Xiaolong ZHAO, Mengfan DING, Fangzhou LIANG, Shi FANG, Zhongfang ZHANG, Xiaohu HOU, Haiding SUN, Guangwei XU, Qin HU, Shibing LONG. High-performance Solar-blind and X-ray Detector Based on Ultra-thin Gallium Oxide Film Grown by MOCVD（Invited）[J]. Acta Photonica Sinica, 2021, 50(10): 1004001
Paper Information
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Received: Aug. 26, 2021
Accepted: Sep. 18, 2021
Published Online: Nov. 3, 2021
The Author Email: ZHAO Xiaolong (xlzhao77@ustc.edu.cn), LONG Shibing (shibinglong@ustc.edu.cn)
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