Optics and Precision Engineering, Volume. 32, Issue 13, 2070(2024)
High-stroke XY precision positioning stage based on Zigzag flexure hinge
Figures & Tables(33)
Fig. 5. Schematic diagram of Zigzag and straight flexible leaf-spring
Fig. 6. Schematic diagram of straight beam flexible leaf-spring deformation
Fig. 12. Stress nebulae of simulation analysis for Zigzag and straight beam flexible leaf-spring
Fig. 15. Finite element dynamic analysis of
Fig. 20. Displacement relationship between driving current and
Fig. 21. Repeatability analysis of
Fig. 22. Displacement tracking analysis of
Table 1. First six-order nature frequencies of flexible leaf-spring
View tableView in ArticleTable 1. First six-order nature frequencies of flexible leaf-spring
阶数 直梁模态 Zigzag模态 1 334 179 2 1 721 208 3 2 079 392 4 5 477 570 5 5 824 147 6 5 876 2 076
Table 2. Comparison of kinematic stiffness of two leaf-spring
View tableView in ArticleTable 2. Comparison of kinematic stiffness of two leaf-spring
簧 片 刚度/（N·mm-1） 直梁柔性簧片 12 Zigzag柔性簧片 5
Table 3. Geometric parameters of two leaf-springs
View tableView in ArticleTable 3. Geometric parameters of two leaf-springs
长度L 厚度d 位移 25 0.30 0.3 30 0.45 0.6 … … 0.9 70 1.35 1.2 75 1.50 1.5
Table 4. Performance parameters of two platforms
View tableView in ArticleTable 4. Performance parameters of two platforms
平台类型 模态
/Hz
行程
/mm
应力
/MPa
长度
/mm
厚度
/mm
直梁簧片 64 ±1.5 77.7 58 0.7 Zigzag簧片 61.5 ±1.5 58.2 58 1.0
Table 5. Geometric dimensions of
XY positioning platformView tableView in ArticleTable 5. Geometric dimensions of
XY positioning platform参数 尺寸 H 231 d 1 h 58 L 58 t 64 T 52 h 30 s 1
Table 6. First sixth order frequency of Zigzag platform
View tableView in ArticleTable 6. First sixth order frequency of Zigzag platform
阶数 模态 1 61.5 2 61.5 3 150 4 198 5 199 6 199
Table 7. Simulation results of parasitic motion of
XY positioning platformView tableView in ArticleTable 7. Simulation results of parasitic motion of
XY positioning platform运动方向 位移/μm 寄生运动/μm 误差/% X 1 500.1 0.173 0.011 5 Y 1 500.6 0.180 0.012 0
Table 8. Dynamic and static parameters of
XY positioning platformView tableView in ArticleTable 8. Dynamic and static parameters of
XY positioning platform频率
/Hz
位移
/mm
刚度
/（N·mm-1）
应力/MPa 许用应力
/MPa
61.5 ±1.5 39 58.2 66.7
Table 9. Performance comparison of designed and existing typical
XY positioning platformsView tableView in ArticleTable 9. Performance comparison of designed and existing typical
XY positioning platforms定位平台 频率/Hz 行程/mm 应力/MPa Wang［ 9 ］108/109 1.4×1.2 170 Cai［ 10 ］73/73 2×2 210 Lin［ 11 ］33/126 2×0.6 280 本文 59.7/61.3 3×3 58.2
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Linfeng ZHAO, Mingxiang LING, Liwei XUE, Hao SHEN, Liguo CHEN. High-stroke XY precision positioning stage based on Zigzag flexure hinge[J]. Optics and Precision Engineering, 2024, 32(13): 2070
Paper Information
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Received: Dec. 30, 2023
Accepted: --
Published Online: Aug. 28, 2024
The Author Email: CHEN Liguo (chenliguo@suda.edu.cn)
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