Optics and Precision Engineering, Volume. 32, Issue 13, 2070(2024)
High-stroke XY precision positioning stage based on Zigzag flexure hinge
A parallel XY precision positioning platform utilizing a Zigzag flexure hinge as a guiding mechanism is presented, designed for large strokes, high precision, high frequency, and low stress to meet precision motion requirements. The implementation features a flexure-based motion platform with the Zigzag flexure hinge as the core guiding beam, driven by a voice coil motor, achieving a motion range of 3 mm×3 mm and a natural frequency exceeding 60 Hz. Finite element simulations compared the Zigzag flexure hinge with traditional straight beam hinges, demonstrating the Zigzag's superiority. Additionally, a decoupling design was employed to minimize parasitic errors from coupled motion. Finite element analysis optimized the platform's configuration to mitigate fatigue damage from high-frequency movement, resulting in reduced maximum stress. The findings indicate that the platform satisfies the required motion and decoupling performance, with a parasitic error of 0.012%. It supports large travel, high-frequency motion, rapid response, and excellent dynamic characteristics. Experimental results confirm a natural frequency of 60 Hz, an open-loop resolution of 1.3 μm, and successful movement of ±1.5 mm in the XY direction.
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Linfeng ZHAO, Mingxiang LING, Liwei XUE, Hao SHEN, Liguo CHEN. High-stroke XY precision positioning stage based on Zigzag flexure hinge[J]. Optics and Precision Engineering, 2024, 32(13): 2070
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Received: Dec. 30, 2023
Accepted: --
Published Online: Aug. 28, 2024
The Author Email: CHEN Liguo (chenliguo@suda.edu.cn)