Optics and Precision Engineering, Volume. 15, Issue 4, 535(2007)
Coupled electromechanical dynamic model of magnetically suspended table system and its stability analysis
[8] [8] MAO J,TACHIKAWA H,SHIMKOHBE A.Precision positioning of a DC-motor-driven aerostatic slide system[J].Precision Eng.,2003,27 (1):32-41.
[9] [9] ZHANG B,ZHU Z.Developing a linear piezomotor with nanometer resolution and high stiffness[J].IEEE/ASME Trans.Mechatronics,1997,2(1):22-29.
Get Citation
Copy Citation Text
[in Chinese], [in Chinese], [in Chinese], [in Chinese]. Coupled electromechanical dynamic model of magnetically suspended table system and its stability analysis[J]. Optics and Precision Engineering, 2007, 15(4): 535