Journal of Semiconductors, Volume. 45, Issue 10, 100401(2024)

Use of the epitaxial MTBs as a 1D gate (Lg = 0.4 nm) for the construction of scaling down two-dimensional field-effect transistors

Youla Yang1, Daixuan Wu1,2、*, He Tian1、**, and Tian-Ling Ren1、***
Author Affiliations
  • 1School of Integrated Circuit, Tsinghua University, Beijing 100083, China
  • 2School of Instrument Science and Technology, Xi'an Jiaotong University, Xi'an 710049, China
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    Figures & Tables(1)
    (Color online) Schematics of FETs with MoS2 MTBs as 1D local gates. A gate stack consisting of MTB and an Al2O3 dielectric layer (5 nm thick, deposited via electron-beam evaporation) was positioned beneath a single-crystal MoS2 monolayer channel (approximately 600 nm in length), which was connected to bismuth source (S) and drain (D) contacts to establish an ohmic contact[4].
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    Youla Yang, Daixuan Wu, He Tian, Tian-Ling Ren. Use of the epitaxial MTBs as a 1D gate (Lg = 0.4 nm) for the construction of scaling down two-dimensional field-effect transistors[J]. Journal of Semiconductors, 2024, 45(10): 100401

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    Paper Information

    Category: Research Articles

    Received: Jul. 15, 2024

    Accepted: --

    Published Online: Dec. 5, 2024

    The Author Email: Wu Daixuan (DXWu), Tian He (HTian), Ren Tian-Ling (TLRen)

    DOI:10.1088/1674-4926/24070013

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