Acta Optica Sinica, Volume. 36, Issue 10, 1012002(2016)
Measurement of Wavefront Aberration of Extreme Ultraviolet Lithographic Projection Lens Based on Ptychography
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Fang Wei, Tang Feng, Wang Xiangzhao, Zhu Penghui, Li Jie, Meng Zejiang, Zhang Heng. Measurement of Wavefront Aberration of Extreme Ultraviolet Lithographic Projection Lens Based on Ptychography[J]. Acta Optica Sinica, 2016, 36(10): 1012002
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Received: Apr. 7, 2016
Accepted: --
Published Online: Oct. 12, 2016
The Author Email: Wei Fang (fangwei20050200@163.com)