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Infrared and Laser Engineering, Volume. 51, Issue 6, 20210640(2022)

Design of on-chip dot array structured light projector using bottom-emitting VCSEL

Renjie Ruan1,2,3, Yinhua Cao1,2,3, Xiaofan Wang1,2,3, Yanhong Ma1,2,3, Zhiyong Wang1,2,3, and Tian Lan1,2,3、*
Author Affiliations
  • 1Beijing Engineering Research Center of Laser Technology, Beijing University of Technology, Beijing 100124, China
  • 2Key Laboratory of Trans-scale Laser Manufacturing Technology, Ministry of Education, Beijing University of Technology, Beijing 100124, China
  • 3Institute of Advanced Technology on Semiconductor Optics & Electronics, Department of Materials and Manufacturing, Beijing University of Technology, Beijing 100124, China
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    AbstractGet PDF(in Chinese)
    Figures&Tables (10)
    Equations (16)
    References (17)
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    Figures & Tables(10)
    Schematic diagram of existing dot array structured light projector

    Fig. 1. Schematic diagram of existing dot array structured light projector

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    Schematic diagram of on-chip dot array structured light projector

    Fig. 2. Schematic diagram of on-chip dot array structured light projector

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    Dot array coded pattern

    Fig. 3. Dot array coded pattern

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    Simulation results under different sampling ratio

    Fig. 4. Simulation results under different sampling ratio

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    Output light intensity distribution of structure-1

    Fig. 5. Output light intensity distribution of structure-1

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    Comparison diagram of evaluation index under different sampling ratio

    Fig. 6. Comparison diagram of evaluation index under different sampling ratio

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    Evaluation index under different oxide apertures

    Fig. 7. Evaluation index under different oxide apertures

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    Evaluation index under different thickness of substrate

    Fig. 8. Evaluation index under different thickness of substrate

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    Simulation results under the optimized design parameters

    Fig. 9. Simulation results under the optimized design parameters

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    • Table 1. Structural parameters used in structure-2

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      Table 1. Structural parameters used in structure-2

      ParameterValue
      Wavelength，λ/nm 980
      Length of target light field，Lx/m 0.01
      Width of target light field，Ly/m 0.01
      Waist radius of VCSEL，w0/μm 2
      Distance from oxide aperture to DOE，z/μm 505
      Thickness of substrate，L/μm 500
      Refractive index of GaAs，n3.52
      Horizontal sampling ratio，M-
      Longitudinal sampling ratio，N-
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    Renjie Ruan, Yinhua Cao, Xiaofan Wang, Yanhong Ma, Zhiyong Wang, Tian Lan. Design of on-chip dot array structured light projector using bottom-emitting VCSEL[J]. Infrared and Laser Engineering, 2022, 51(6): 20210640

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    Paper Information

    Category: Optical design

    Received: Sep. 3, 2021

    Accepted: --

    Published Online: Dec. 20, 2022

    The Author Email:

    DOI:10.3788/IRLA20210640

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology