Laser & Optoelectronics Progress, Volume. 47, Issue 3, 32301(2010)
Grating Light Modulator Applied to Novel Micro-Spectrometer
[1] [1] Zhang Zhihai. Study on Some Key Technologies of MOEMS-based Grating Moving Light Modulator Array [D]. Chongqing: Chongqing University,2007. 1-2
[2] [2] D. M. Bloom. The grating light valve: revolutionizing display technology[C]. SPIE,1997,3013: 165-171
[3] [3] Chen Feifan,Yin Ling,Li Yunlong et al.. Review and prospects of research on micro-opto-electro-mechanical system[J]. Microfabrication Technol.,2002,20(3): 1-7
[5] [5] Yan Xu,Huang Shanglian,Zhang Jie et al.. Grating light modulator based on MOEMS[C]. 11th Commission for Optoelectronics Technology & Systems. 2005. 795-799
[6] [6] Joseph I. Seeger,Selden B. Craary. Stabilization of electrostatically actuated mechanical devices[C]. International Conference on Solid-state Sensors and Actuators,Chicago,America.1997. 16-19
[7] [7] M. A. Michalicek,D. E. Sene,V. M. Bright. Advanced modeling of micromirror devices[C]. Proceedings of the International Conference on Integrated Micro/Nanotechnology for Space Applications,NASA & Aerospace Corp,1995. 214-229
[8] [8] Gary Keith Fedder. Simulation of Microelectromechanical Systems[D]. Berkeley: California University,1994. 67-156
[9] [9] Yan Xu. Structural Parameter Analysis and Experiment of MEMS-based Grating Moving Light Modulator[D]. Chongqing: University of Chongqing,2006. 18-19
[10] [10] Adirak Kanchanaharuthai,Adisorn Tuantranont. Feedback controller design with D stability in silicon-micromachined piston micromirrors[C]. IEEE,2002,2: 936-940
Get Citation
Copy Citation Text
Wang Wei, Wen Zhiyu, Zhang Zhihai, Jin Zhu, Guo Yuanjun, Mo Xiangxia. Grating Light Modulator Applied to Novel Micro-Spectrometer[J]. Laser & Optoelectronics Progress, 2010, 47(3): 32301
Category: Optical Devices
Received: Aug. 2, 2009
Accepted: --
Published Online: Feb. 10, 2010
The Author Email: Wei Wang (london202@sina.com)