Improvement of thickness uniformity and elements distribution homogeneity for multicomponent films prepared by coaxial scanning pulsed laser deposition technique

Juguang Hu; Qiwen Li; Xiaodong Lin; Yi Liu; Jinghua Long; Liuyang Wang; Huabin Tang

doi:10.3788/col201412.072201

Chinese Optics Letters, Volume. 12, Issue 7, 072201(2014)

Improvement of thickness uniformity and elements distribution homogeneity for multicomponent films prepared by coaxial scanning pulsed laser deposition technique

Juguang Hu, Qiwen Li, Xiaodong Lin, Yi Liu, Jinghua Long, Liuyang Wang, and Huabin Tang

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Juguang Hu, Qiwen Li, Xiaodong Lin, Yi Liu, Jinghua Long, Liuyang Wang, Huabin Tang. Improvement of thickness uniformity and elements distribution homogeneity for multicomponent films prepared by coaxial scanning pulsed laser deposition technique[J]. Chinese Optics Letters, 2014, 12(7): 072201

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Paper Information

Category: Optical Design and Fabrication

Received: Nov. 27, 2013

Accepted: Apr. 29, 2014

Published Online: Jun. 26, 2014

The Author Email:

DOI:10.3788/col201412.072201

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology