Optics and Precision Engineering, Volume. 32, Issue 17, 2625(2024)

White-light interferometry immune to vibration disturbance over wide frequency region

Qian LIU*... Le MI and Xiaojin HUANG |Show fewer author(s)
Author Affiliations
  • Institute of Machinery Manufacturing Technology, China Academy of Engineering Physics, Mianyang621999, China
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    The traditional white-light interferometer is highly sensitive to vibrations, causing scanning step errors and reducing measurement accuracy. To address this, a three-point arcsine (3P-Asin) algorithm is proposed. This method divides WLI interferograms into groups of three adjacent frames, with overlap between groups. By analyzing fringe movement, the phase shift deviation and exact scanning step are determined. Using this step, a least-squares method calculates phase and modulation for non-equal step scanning to reconstruct surface height. The 3P-Asin algorithm detects fast and large scanning step errors using only three interferograms, with no approximation. Simulations and experiments show it achieves an accuracy of 0.5% for a 10 μm step height and adapts to various surfaces in mechanical machining. Both theoretical and experimental results demonstrate that the 3P-Asin algorithm effectively attenuates scanning step errors across a wide frequency range, making it suitable for WLI in vibrating environments.

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    Qian LIU, Le MI, Xiaojin HUANG. White-light interferometry immune to vibration disturbance over wide frequency region[J]. Optics and Precision Engineering, 2024, 32(17): 2625

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    Paper Information

    Category: Precision Measurement and Sensing

    Received: May. 19, 2024

    Accepted: --

    Published Online: Nov. 18, 2024

    The Author Email: LIU Qian (liuqianblue@126.com)

    DOI:10.37188/OPE.20243217.2625

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