Fig. 1. Schematic block diagram of MEMS gyroscope based on FTR rate control mode

Fig. 2. Diagram of drive modal control loop with phase errors

Fig. 3. Trends in the effect of ω_d-ω_x on φ_x for different Q_x

Fig. 4. Effect of phase error on drive modal control loop

Fig. 5. Schematic diagram of FTR control loop with phase error

Fig. 6. Effect of φ_ye1 on rate measurement with constant rate input

Fig. 7. Effect of φ_ye1 on magnitude-phase frequency characteristic of FTR rate measurement loop

Fig. 8. Trends in the effect of ω_y-ω_d and Q_y on φ_y

Fig. 9. FTR rate measurement curves before and after phase compensation for different Q_y

Fig. 10. Effect of φ_ye2 on magnitude-phase frequency characteristic of FTR rate measurement loop

Fig. 11. Effect of φ_ye3 on magnitude-phase frequency characteristic of FTR rate measurement loop

Fig. 12. Gyroscope measurement and control system and its test equipment

Fig. 13. Phase difference between the drive modal pickoff signal for the force balance excitation signal （solid） and the sense modal pickoff signal （dash）

Fig. 14. Bias curves and Allan variance curves before and after phase compensation

Fig. 15. Rate measurement bandwidth test curves before and after phase compensation