Optics and Precision Engineering, Volume. 32, Issue 20, 3059(2024)

Analysis and verification of phase error in force balance control loop of MEMS rate gyroscope

Yang GAO1, Jia JIA2, Lin MENG1, Zhihu RUAN1, and Huiliang CAO3、*
Author Affiliations
  • 1Artificial Intelligence Industrial Technology Research Institute, Nanjing Institute of Technology,Nanjing267, China
  • 2College of Automation, Jiangsu University of Science and Technology, Zhenjiang1003, China
  • 3School of Instrument and Electronics, North University of China, Taiyuan00051, China
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    In order to clarify the influence of phase error on the static and dynamic performance of MEMS rate gyroscopes based on the force to rebalance (FTR) measurement mode, the model of FTR rate control loop with phase error was constructed to analyze the influence of different phase errors on the dynamic and static performance. Firstly, the basic principle of the gyroscope using FTR rate mode was introduced, and the effect of phase error on the driving modes was briefly analyzed. Secondly, the model of FTR rate control loop containing phase errors in the feedback and forward channels was proposed, and an equivalent transformation of the model was performed. Thirdly, the effects of different types of phase errors on the dynamic and static performance of the gyroscope were analyzed according to the above model. Finally, the corresponding experimental validation was conducted. Experimental results indicate that the stability of the two-hourly measured value of the phase error in the feedback channel is 0.094 9, and the error only changes the value of scale factor; the bias and bias drift values before and after the compensation of the phase error in the forward channel are reduced by 4.8 and 2.9 times, respectively, and the bias instability and angular random walking are improved by 0.8 and 0.9 times, respectively. The phase error in the feedback channel can be compensated by the calibration, and this error only affects the value of the scale factor, and does not affect the bias and bandwidth performance; the phase error in the forward channel seriously restricts the static performance, but does not affect the dynamic performance at room temperature.

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    Yang GAO, Jia JIA, Lin MENG, Zhihu RUAN, Huiliang CAO. Analysis and verification of phase error in force balance control loop of MEMS rate gyroscope[J]. Optics and Precision Engineering, 2024, 32(20): 3059

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    Paper Information

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    Received: Aug. 24, 2024

    Accepted: --

    Published Online: Jan. 10, 2025

    The Author Email: CAO Huiliang (caohuiliang@nuc.edu.cn)

    DOI:10.37188/OPE.20243220.3059

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