Chinese Optics Letters, Volume. 17, Issue 12, 121102(2019)
Adaptive gradient-based source and mask co-optimization with process awareness
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Yijiang Shen, Fei Peng, Xiaoyan Huang, Zhenrong Zhang. Adaptive gradient-based source and mask co-optimization with process awareness[J]. Chinese Optics Letters, 2019, 17(12): 121102
Category: Imaging Systems
Received: Apr. 24, 2019
Accepted: Aug. 6, 2019
Published Online: Dec. 3, 2019
The Author Email: Yijiang Shen (yjshen@gdut.edu.cn)