[1] [1] CLAMPIN M, Status of the james webb space telescope (JWST)[J]. SPIE, 2008,7010:1-70100L.

[2] [2] MATSUYAMA T, OHMURA Y, WILLIAMSON D M. The lithographic lens: its history and evolution [C]. SPIE, 2006,6154: 24-37.

[3] [3] LIN Q, JIN CH SH, XIANG P, et al.．Computer-aided alignment of Schwarzchild objective with off axis illumination [J]．Opt. Precision Eng., 2003, 11(2):144-150. (in Chinese)

[4] [4] ARNOLD T, BOHM G, FECHNER R, et al.. Ultra-precision surface finishing by ion beam and plasma jet techniques-status and outlook [J]. Nuclear Instruments and Methods in Physics Research A, 2010,616:147-156.

[5] [5] WU J F, LU ZH W, ZHANG H X, et al.. Model of ion beam figuring in aspheric optics and its error control [J] Opt. Precision Eng., 2009,17(11):2678-2689.(in Chinese)

[6] [6] ZHOU X SH, Study on techniques in computer-controlled grinding and polishing for large and medium aspheric surfaces [D]. Beijing: Graduate university of Chinese Academy of Science，2007.(in Chinese)

[7] [7] KORDONSKI W. Apparatus and method for abrasive jet finishing of deep concave surfaces using magneto-rheological fluid [P]. US Patent, 2003, 6561874.

[8] [8] MOH L L, GEK S CH, QUN Y L, et al.. Ion Beam Figuring (IBF) for high precision optics [J]. SPIE,2010,7591:1-9.

[9] [9] TAKAYUKI H, CHIDANE O, MASANOBU H. EUV wavefront metrology system in EUVA[J] SPIE, 2004, 5374:797-807.

[10] [10] MA Q, LIU W Q, LI X B, et al.. Analysis of diffraction wavefront error in point diffraction interferometer [J] Acta Optica Sinica, 2008, 28(12):2321-2324. (in Chinese)

[11] [11] WYANT J C, O’NEILL P K, Computer generated hologram; null lens test of aspheric wavefronts[J] Applied optics, 1974, 13(12):2762-2765.

[12] [12] SCHULZ G, SCHWIDER J, Interferometric testing of smooth surfaces [J] Progress in Optics (North-Holland, Amsterdam), 1976, 13:93-167.

[13] [13] GUNTER S and JORGEN G, Absolute flatness testing by the rotation method with optimal measuring-error compensation [J] APPLIED OPTICS, 1992, 31(19):3767-3780.

[14] [14] FRITZ B S. Absolute calibration of an optical flat [J] Opt. Precision Eng., 1984,23:379-383.

[15] [15] AI. C., WYANT J C, Absolute testing of flats by using even and odd functions [J] Appl. Opt. 1993,32:4698-4705.

[16] [16] PARKS R E. A practical implementation of the random ball test [J] in Frontiers in Optics, OSA Technical Digest, 2006， 12:1-3.

[17] [17] EDLEN B, The refractive index of air [J] Metrologia, 1966,2(2):71-80.

[18] [18] BRICH K P, DOWNS M J. Correction to the updated edlen equation for the refractive index of air [J] Metrologia, 1994, 31(4): 315-316.