Researching | Progress and Challenge of 3D Photonic Integrated Circuit（Invited）

Acta Photonica Sinica, Volume. 51, Issue 7, 0751416(2022)

Progress and Challenge of 3D Photonic Integrated Circuit（Invited）

Yuexin YIN... Xinru XU, Yingzhi DING, Mengke YAO, Guoyan ZENG and Daming ZHANG* |Show fewer author(s)

Author Affiliations

State Key Laboratory of Integrated Optoelectronics，College of Electronic Science and Engineering，Jilin University，Changchun 130012，China

show less

Abstract Get PDF(in Chinese)

Figures&Tables (16)

References (75)

Paper Information

References(75)

[1] P J WINZER, D T NEILSON, A R CHRAPLYVY. Fiber-optic transmission and networking: the previous 20 and the next 20 years (Invited). Optics Express, 26, 24190-24239(2018).

[2] Q CHENG, M BAHADORI, M S GLICK et al. Recent advances in optical technologies for data centers: a review. Optica, 5, 1354-1367(2018).

[3] R SABELLA. Silicon photonics for 5G and future networks. IEEE Journal of Selected Topics in Quantum Electronics, 26, 1-11(2020).

[4] W SHI, Y TIAN, A GERVAIS et al. Scaling capacity of fiber-optic transmission systems via silicon photonics. Nanophotonics, 9, 4629-4663(2020).

[5] N C ABRAMS, Q CHENG, M GLICK et al. Silicon photonic 2.5D multi-chip module transceiver for high-performance data centers. Journal of Lightwave Technology, 38, 3346-3357(2020).

[6] C KOOS, J LEUTHOLD, W FREUDE et al. Silicon-organic hybrid (SOH) and plasmonic-organic hybrid (POH) integration. Journal of Lightwave Technology, 34, 256-268(2016).

[7] S Y SIEW, B LI, F GAO et al. Review of silicon photonics technology and platform development. Journal of Lightwave Technology, 39, 4374-4389(2021).

[8] N M FAHRENKOPF, C MCDONOUGH, G L LEAKE et al. The AIM photonics MPW: a highly accessible cutting edge technology for rapid prototyping of photonic integrated circuits. IEEE Journal of Selected Topics in Quantum Electronics, 25, 1-6(2019).

[9] C G H ROELOFFZEN, M HOEKMAN, E J KLEIN et al. Low-loss Si3N4 triplex optical waveguides: technology and applications overview. IEEE Journal of Selected Topics in Quantum Electronics, 24, 1-21(2018).

[10] T D BUCIO, C LACAVA, M CLEMENTI et al. Silicon nitride photonics for the near-infrared. IEEE Journal of Selected Topics in Quantum Electronics, 26, 1-13(2020).

[11] J M RAMIREZ, S MALHOUITRE, K GRADKOWSKI et al. III-V-on-silicon integration: from hybrid devices to heterogeneous photonic integrated circuits. IEEE Journal of Selected Topics in Quantum Electronics, 26, 1-13(2020).

[12] I M SOGANCI, T TANEMURA, Y NAKANO. Integrated phased-array switches for large-scale photonic routing on chip. Laser & Photonics Reviews, 6, 549-563(2012).

[13] M TAKAHASHI, S YAMASAKI, Y UCHIDA et al. Compact and low-loss ZrO2-SiO2 PLC-based 8×8 multicast switch for CDC-ROADM application. Journal of Lightwave Technology, 34, 1712-1716(2016).

[14] L LIU, L CHANG, Y KUANG et al. Low-cost hybrid integrated 4 × 25 GBaud PAM-4 CWDM ROSA with a PLC-based arrayed waveguide grating de-multiplexer. Photonics Research, 7, 722-727(2019).

[15] D de FELIPE, M KLEINERT, C ZAWADZKI et al. Recent developments in polymer-based photonic components for disruptive capacity upgrade in data centers. Journal of Lightwave Technology, 35, 683-689(2017).

[16] X Y Han, Z L Wu, S C Yang et al. Recent progress of imprinted polymer photonic waveguide devices and applications. Polymers, 10, 603(2018).

[17] T J SEOK, N QUACK, S HAN et al. Large-scale broadband digital silicon photonic switches with vertical adiabatic couplers. Optica, 3, 64-70(2016).

[18] S J B YOO, B GUAN, R P SCOTT. Heterogeneous 2D/3D photonic integrated microsystems. Microsyst Nanoeng, 2, 16030(2016).

[19] K ITOH, Y HAYASHI, J SUZUKI et al. Crystalline/amorphous Si integrated optical couplers for 2D/3D interconnection. IEEE Journal of Selected Topics in Quantum Electronics, 22, 255-263(2016).

[20] Y ZHANG, Y C LING, Y ZHANG et al. High-density wafer-scale 3-D silicon-photonic integrated circuits. IEEE Journal of Selected Topics in Quantum Electronics, 24, 1-10(2018).

[21] Y ZHANG, A SAMANTA, K SHANG et al. Scalable 3D silicon photonic electronic integrated circuits and their applications. IEEE Journal of Selected Topics in Quantum Electronics, 26, 1-10(2020).

[22] H MORADINEJAD, A H ATABAKI, A H HOSSEINNIA et al. Double-layer crystalline silicon on insulator material platform for integrated photonic applications. IEEE Photonics Journal, 6, 1-8(2014).

[23] T KIM, T NGAI, Y TIMALSINA et al. A single-chip optical phased array in a wafer-scale silicon photonics/CMOS 3D-integration platform. IEEE Journal of Solid-State Circuits, 54, 3061-3074(2019).

[24] K JOONHYUN, Y ATSUMI, Y HAYASHI et al. Amorphous-silicon inter-layer grating couplers with metal mirrors toward 3-D interconnection. IEEE Journal of Selected Topics in Quantum Electronics, 20, 317-322(2014).

[25] J CHILES, S BUCKLEY, N NADER et al. Multi-planar amorphous silicon photonics with compact interplanar couplers, cross talk mitigation, and low crossing loss. APL Photonics, 2, 116101(2017).

[26] R PETRA, S Z OO, A TARAZONA et al. HWCVD a-Si:H interlayer slope waveguide coupler for multilayer silicon photonics platform. Optics Express, 27, 15735-15749(2019).

[27] K PRESTON, B SCHMIDT, M LIPSON. Polysilicon photonic resonators for large-scale 3D integration of optical networks. Optics Express, 15, 5118-5124(2007).

[28] Q FANG, J F SONG, S H TAO et al. Low loss (approximately 6.45dB/cm) sub-micron polycrystalline silicon waveguide integrated with efficient SiON waveguide coupler. Optics Express, 16, 6425-6432(2008).

[29] K PRESTON, S MANIPATRUNI, A GONDARENKO et al. Deposited silicon high-speed integrated electro-optic modulator. Optics Express, 17, 5118-5124(2009).

[30] Y FRANZ, A F J RUNGE, S Z OO et al. Laser crystallized low-loss polycrystalline silicon waveguides. Optics Express, 27, 4462-4470(2019).

[31] Y H LEE, M O THOMPSON, M LIPSON. Deposited low temperature silicon GHz modulator. Optics Express, 21, 26688-26692(2013).

[32] X CHEN, M M MILOSEVIC, D J THOMSON et al. Post-fabrication phase trimming of Mach-Zehnder interferometers by laser annealing of germanium implanted waveguides. Photonics Research, 5, 578-582(2017).

[33] J F BAUTERS, M L DAVENPORT, M J HECK et al. Silicon on ultra-low-loss waveguide photonic integration platform. Optics Express, 21, 544-555(2013).

[34] Y HUANG, J SONG, X LUO et al. CMOS compatible monolithic multi-layer Si3N4-on-SOI platform for low-loss high performance silicon photonics dense integration. Optics Express, 22, 21859-21865(2014).

[35] M SODAGAR, R POURABOLGHASEM, A A EFTEKHAR et al. High-efficiency and wideband interlayer grating couplers in multilayer Si/SiO2/SiN platform for 3D integration of optical functionalities. Optics Express, 22, 16767-16777(2014).

[36] K SHANG, S PATHAK, B GUANG et al. Low-loss compact multilayer silicon nitride platform for 3D photonic integrated circuits. Optics Express, 23, 21334-21342(2015).

[37] W D SACHER, J C MIKKELSEN, P DUMAIS et al. Tri-layer silicon nitride-on-silicon photonic platform for ultra-low-loss crossings and interlayer transitions. Optics Express, 25, 30862-30875(2017).

[38] R KONOIKE, K SUZUKI, K TANIZAWA et al. SiN/Si double-layer platform for ultralow-crosstalk multiport optical switches. Optics Express, 27, 21130-21141(2019).

[39] K SUZUKI, S NAMIKI, H KAWASHIMA et al. Nonduplicate polarization-diversity 32 × 32 silicon photonics switch based on a SiN/Si double-layer platform. Journal of Lightwave Technology, 38, 226-232(2020).

[40] P WANG, G LUO, Y XU et al. Design and fabrication of a SiN-Si dual-layer optical phased array chip. Photonics Research, 8, 912-919(2020).

[41] Y LI, B CHENG, Q NA et al. Wide-steering-angle high-resolution optical phased array. Photonics Research, 9, 2511-2518(2021).

[42] L ZHANG, Y LI, B CHENG et al. Two-dimensional multi-layered SiN-on-SOI optical phased array with wide-scanning and long-distance ranging. Optics Express, 30, 5008-5018(2022).

[43] N KEIL, H H YAO, C ZAWADZKI et al. Hybrid polymer/silica thermo-optic vertical coupler switches. Applied Physics B, 73, 469-473(2014).

[44] J DONG, K S CHIANG, W JIN. Compact three-dimensional polymer waveguide mode multiplexer. Journal of Lightwave Technology, 33, 4580-4588(2015).

[45] M U KHAN, J JUSTICE, J PETAJA et al. Multi-level single mode 2D polymer waveguide optical interconnects using nano-imprint lithography. Optics Express, 23, 14630-14639(2015).

[46] Q HUANG, K S CHIANG. High-order-mode-pass mode (de)multiplexer with a hybrid-core vertical directional coupler. Journal of Lightwave Technology, 37, 3932-3938(2019).

[47] X JIANG, Z YANG, Z LIU et al. 3D integrated wavelength demultiplexer based on a square-core fiber and dual-layer arrayed waveguide gratings. Optics Express, 29, 2090-2098(2021).

[48] A RAPTAKIS, L GUONARIDIS, M WEIGEL et al. 2D optical phased arrays for laser beam steering based on 3D polymer photonic integrated circuits. Journal of Lightwave Technology, 39, 6509-6523(2021).

[49] Z ZHANG, M KLEINERT, A MAESENOVO et al. Multicore polymer waveguides and multistep 45° mirrors for 3D photonic integration. IEEE Photonics Technology Letters, 26, 1986-1989(2014).

[50] Q HUANG, K S CHIANG, W JIN. Thermo-optically controlled vertical waveguide directional couplers for mode-selective switching. IEEE Photonics Journal, 10, 1-14(2018).

[51] Q HUANG, Y WU, W JIN et al. Mode multiplexer with cascaded vertical asymmetric waveguide directional couplers. Journal of Lightwave Technology, 36, 2903-2911(2018).

[52] C S IM, S M KIM, K P LEE et al. Hybrid integrated silicon nitride-polymer optical phased array for efficient light detection and ranging. Journal of Lightwave Technology, 39, 4402-4409(2021).

[53] M JIANG, D ZHANG, T LIAN et al. On-chip integrated optical switch based on polymer waveguides. Optical Materials, 97, 109386(2019).

[54] X XU, L MA, Z HE. 3D polymer directional coupler for on-board optical interconnects at 1550 nm. Optics Express, 26, 16344-16351(2018).

[55] A NESIC, M BLAICHER, T HOOSE et al. Photonic-integrated circuits with non-planar topologies realized by 3D-printed waveguide overpasses. Optics Express, 27, 17402-17425(2019).

[56] P GASO, D PUDIS, D SEYRINGER et al. 3D Polymer based 1×4 beam splitter. Journal of Lightwave Technology, 39, 154-161(2021).

[57] J D BRADLEY, E S HOSSEINI, PURNAWIRMAN et al. Monolithic erbium- and ytterbium-doped microring lasers on silicon chips. Optics Express, 22, 12226-12237(2014).

[58] N LI, D VERMEULEN, Z SU et al. Monolithically integrated erbium-doped tunable laser on a CMOS-compatible silicon photonics platform. Optics Express, 26, 16200-16211(2018).

[59] J MU, M DIJKSTRA, S M GARCIA-BLANCO. Resonant coupling for active-passive monolithic integration of Al2O3 and Si3N4. IEEE Photonics Technology Letters, 31, 771-774(2019).

[60] J MU, M DIJKSTRA, Y S YONG et al. Monolithic integration of Al2O3 and Si3N4 toward double-layer active-passive platform. IEEE Journal of Selected Topics in Quantum Electronics, 25, 1-11(2019).

[61] J MU, M DIJKSTRA, J KORTERIK et al. High-gain waveguide amplifiers in Si3N4 technology via double-layer monolithic integration. Photonics Research, 8, 1634-1641(2020).

[62] COP DE BEECK, B HAQ, L ELSINGER et al. Heterogeneous III-V on silicon nitride amplifiers and lasers via microtransfer printing. Optica, 7, 386-393(2020).

[63] R KOU, T HIRATANI, H YAGI et al. Inter-layer light transition in hybrid III-V/Si waveguides integrated by micro-transfer printing. Optics Express, 28, 19772-19782(2020).

[64] D GUANGHUA, C JANY, A LE LIEPVRE et al. Hybrid III--V on silicon lasers for photonic integrated circuits on silicon. IEEE Journal of Selected Topics in Quantum Electronics, 20, 158-170(2014).

[65] S T CHU, W PAN, S SATO et al. ARROW-type vertical coupler filter: design and fabrication. Journal of Lightwave Technology, 17, 652-658(1999).

[66] B E LITTLE, S T CHU, W PAN et al. Vertically coupled glass microring resonator channel dropping filters. IEEE Photonics Technology Letters, 11, 215-217(1999).

[67] S T CHU, W PAN, S SATO et al. Wavelength trimming of a microring resonator filter by means of a UV sensitive polymer overlay. IEEE Photonics Technology Letters, 11, 688-690(1999).

[68] S T CHU, P WUGAN, S SUZUKI et al. Temperature insensitive vertically coupled microring resonator add/drop filters by means of a polymer overlay. IEEE Photonics Technology Letters, 11, 1138-1140(1999).

[69] S M GARNER, L SANG-SHIN, V CHUYANOV et al. Three-dimensional integrated optics using polymers. IEEE Journal of Quantum Electronics, 35, 1146-1155(1999).

[70] P KOONATH, T INDUKURI, B JALALI. Monolithic 3-D silicon photonics. Journal of Lightwave Technology, 24, 1796-1804(2006).

[71] C XIANG, W JIN, D HUANG et al. High-performance silicon photonics using heterogeneous integration. IEEE Journal of Selected Topics in Quantum Electronics, 28, 1-15(2022).

[72] Y HU, D LIANG, K MUKHERJEE et al. III/V-on-Si MQW lasers by using a novel photonic integration method of regrowth on a bonding template. Light: Science & Applications, 8, 93(2019).

[73] D J MOSS, R MORANDOTTI, A L GAETA et al. New CMOS-compatible platforms based on silicon nitride and Hydex for nonlinear optics. Nature Photonics, 7, 597-607(2013).

[74] Z YE, A FULOP, O B HELGASON et al. Low-loss high-Q silicon-rich silicon nitride microresonators for Kerr nonlinear optics. Optics Letters, 44, 3326-3329(2019).

[75] K TANIZAWA, K SUZUKI, K IKEDA et al. Non-duplicate polarization-diversity 8×8 Si-wire PILOSS switch integrated with polarization splitter-rotators. Optics Express, 25, 10885-10892(2017).

Tools

Get Citation

Copy Citation Text

Yuexin YIN, Xinru XU, Yingzhi DING, Mengke YAO, Guoyan ZENG, Daming ZHANG. Progress and Challenge of 3D Photonic Integrated Circuit（Invited）[J]. Acta Photonica Sinica, 2022, 51(7): 0751416

Download Citation

EndNote(RIS)BibTex Plain Text

Set citation alerts for article

Save article for my favorites

Paper Information

Category: Special Issue for the 60th Anniversary of XIOPM of CAS, and the 50th Anniversary of the Acta Photonica Sinica

Received: May. 5, 2022

Accepted: Jun. 7, 2022

Published Online: Oct. 25, 2022

The Author Email: ZHANG Daming (zhangdm@jlu.edu.cn)

DOI:10.3788/gzxb20225107.0751416

Topics

laser devices and laser physics

Lasers and Laser Optics

laser manufacturing

Instrumentation, Measurement and Metrology