Large Aperture Off-Axis Aspherical Segment Test Using Refraction and Diffraction Mixed Compensation Based on Computer Generated Hologram

Ya Huang; Fengpu Wang; Xinnan Li; Zhe Chen; Bo Li; Chen Xu; Ting Cao

doi:10.3788/AOS202242.1212004

Acta Optica Sinica, Volume. 42, Issue 12, 1212004(2022)

Large Aperture Off-Axis Aspherical Segment Test Using Refraction and Diffraction Mixed Compensation Based on Computer Generated Hologram

Ya Huang^1,2、*, Fengpu Wang^1,2, Xinnan Li^1,2, Zhe Chen^1,2, Bo Li^1,2, Chen Xu^1,2, and Ting Cao^1,2

Author Affiliations

¹Nanjing Institute of Astronomical Optics & Technology, National Astronomical Observatories, Chinese Academy of Sciences, Nanjing 210042, Jiangsu, China;

²CAS Key Laboratory of Astronomical Optics & Technology, Nanjing Institute of Astronomical Optics & Technology, Nanjing 210042, Jiangsu, China;

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Figures & Tables(16)

Fig. 1. Primary mirror sectors and segment numbering scheme of TMT

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Fig. 2. Sag and asphericity of TMT segments after rotation and translation. (a) Max sag and max asphericity of TMT segments as functions of off-axis distance; (b) sag distribution and (c) asphericity distribution of TMT segment with off-axis distance of 13.99 m

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$Measurement light path of refraction and diffraction mixed compensation using large aperture off-axis mirror$

Fig. 3. Measurement light path of refraction and diffraction mixed compensation using large aperture off-axis mirror

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Fig. 4. Layout of aplanatic lens test

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$Simulation of TMT segment test using refraction and diffraction mixed compensation. (a) Layout of simulation; (b) wavefront residual error; (c) spot diagram of multiple diffraction orders$

Fig. 5. Simulation of TMT segment test using refraction and diffraction mixed compensation. (a) Layout of simulation; (b) wavefront residual error; (c) spot diagram of multiple diffraction orders

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Fig. 6. First 15 Zernike fringe polynomial coefficients of CGH phase function after normalization

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$Distortion ratio of different off-axis TMT segments obtained by CGH refraction and diffraction mixed detection method and CGH direct detection method. (a) Distortion ratio as a function of off-axis distance obtained by different methods; (b) phase of CGH obtained by direction compensation for 13.99 m off-axis distance TMT segment; (c) phase of CGH obtained by refraction and diffraction mixed detection for 13.99 m off-axis distance TMT segment with lens$

Fig. 7. Distortion ratio of different off-axis TMT segments obtained by CGH refraction and diffraction mixed detection method and CGH direct detection method. (a) Distortion ratio as a function of off-axis distance obtained by different methods; (b) phase of CGH obtained by direction compensation for 13.99 m off-axis distance TMT segment; (c) phase of CGH obtained by refraction and diffraction mixed detection for 13.99 m off-axis distance TMT segment with lens

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Fig. 8. Layout of CGH

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$Simulation of trial CGH refraction and diffraction mixed compensation. (a) Phase distribution of CGH; (b) wavefront residual error$

Fig. 9. Simulation of trial CGH refraction and diffraction mixed compensation. (a) Phase distribution of CGH; (b) wavefront residual error

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$Actual test optical path of CGH refraction and diffraction mixed compensation of trial mirror$

Fig. 10. Actual test optical path of CGH refraction and diffraction mixed compensation of trial mirror

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$Test results of CGH refraction and diffraction mixed compensation of trial mirror. (a) Interferogram; (b) surface test result$

Fig. 11. Test results of CGH refraction and diffraction mixed compensation of trial mirror. (a) Interferogram; (b) surface test result

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Fig. 12. Test result calibration of trial mirror. (a) Error calibration of aplanatic lens; (b) surface test result of trial mirror after calibration

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Fig. 13. Test result of trial mirror CGH autocollimation method

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Table 1. Element adjustment tolerance and wavefront aberration change of testing system for refraction and diffraction mixed compensation

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Table 1. Element adjustment tolerance and wavefront aberration change of testing system for refraction and diffraction mixed compensation

Element	Distancetolerance /μm	WavefrontRMS /nm	Tilttolerance /(')	WavefrontRMS /nm
	10 (dx)	2.210	5 (tilt x)	2.192
CGH	10 (dy)	2.204	5 (tilt y)	2.212
	50 (dz)	4.147	100 (tilt z)	2.210
	100 (dx)	2.210	5 (tilt x)	2.348
Aplanaticlens	100 (dy)	2.304	5 (tilt y)	2.330
	1000 (dz)	2.211	100 (tilt z)	2.210
Off-axissegment	100 (dx)	2.210
	100 (dy)	2.210

Table 2. Distortion ratio of different off-axis TMT segments obtained by CGH refraction and diffraction mixed detection method and CGH direct detection method

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Table 2. Distortion ratio of different off-axis TMT segments obtained by CGH refraction and diffraction mixed detection method and CGH direct detection method

Off-axisdistance /mm	Distortion ratio ofCGH without lens	Distortion ratio ofCGH with lens	Off-axisdistance /mm	Distortion ratio ofCGH without lens	Distortion ratio ofCGH with lens
2170	1.023	1.007	8651	1.602	1.105
3313	1.059	1.017	9744	1.976	1.131
4337	1.102	1.028	10794	2.508	1.157
5006	1.138	1.037	11876	4.022	1.189
6254	1.240	1.057	12923	7.762	1.218
7499	1.384	1.081	13994	12.523	1.248

Table 3. Error of trial mirror test using refraction and diffraction mixed compensation
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Table 3. Error of trial mirror test using refraction and diffraction mixed compensation
Error type RMS error
CGH patterning error 0.005λ
CGH substrate shape 0.005λ
CGH encoding error 0.006λ
Wavefront of aplanatic lens 0.0176λ
Adjustment error 0.01λ
Total error 0.0107λ

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Ya Huang, Fengpu Wang, Xinnan Li, Zhe Chen, Bo Li, Chen Xu, Ting Cao. Large Aperture Off-Axis Aspherical Segment Test Using Refraction and Diffraction Mixed Compensation Based on Computer Generated Hologram[J]. Acta Optica Sinica, 2022, 42(12): 1212004

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Paper Information

Category: Instrumentation, Measurement and Metrology

Received: Jan. 6, 2022

Accepted: Mar. 21, 2022

Published Online: Jun. 8, 2022

The Author Email: Huang Ya (yhuang@niaot.ac.cn)

DOI:10.3788/AOS202242.1212004

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology

Table 1. Element adjustment tolerance and wavefront aberration change of testing system for refraction and diffraction mixed compensation

Table 1. Element adjustment tolerance and wavefront aberration change of testing system for refraction and diffraction mixed compensation

Table 2. Distortion ratio of different off-axis TMT segments obtained by CGH refraction and diffraction mixed detection method and CGH direct detection method

Table 2. Distortion ratio of different off-axis TMT segments obtained by CGH refraction and diffraction mixed detection method and CGH direct detection method

Table 3. Error of trial mirror test using refraction and diffraction mixed compensation

Table 3. Error of trial mirror test using refraction and diffraction mixed compensation