Infrared and Laser Engineering, Volume. 50, Issue S2, 20210297(2021)
Estimation method of laser micro-scale ablation quality based on image
Figures & Tables(14)
Fig. 2. Ablation pit image. (a) Upper and lower surfaces; (b) Side surfaces
Fig. 5. Ablation pit shape. (a)Assuming the shape of the ablation pit;(b) Upper and lower surfaces of real ablation pits; (c) The side of the real ablation pit
Fig. 7. Simulation results of semi-circular surface. (a) Semicircle surface; (b) Composite image; (c) Reconstruction surface; (d) Reconstruction error
Fig. 8. Image of ablation pit. (a) A profile view; (b) Traditional volume method; (c) Reconstruction volume method; (d) Reconstruction plan; (e) Reconstruction of the top view
Fig. 9. Contrast ablation pit image. (a) A profile view; (b) Traditional volume method; (c) Reconstruction volume method; (d) Reconstruction plan; (e) Reconstruction of the top view
Table 1. Comparison results of MAE and RMSE
View tableView in ArticleTable 1. Comparison results of MAE and RMSE
Composograph MAE/pixel RMSE/pixel Circular truncated cone 30 45
Table 2. Reconstructed ablation pit parameters
View tableView in ArticleTable 2. Reconstructed ablation pit parameters
Ablation pit parameters Volume/μm3 Quality/μg Ideal frustum of a cone 7.54×106 12.07 Reconstruction of ablation pits 4.45×106 7.12
Table 3. Contrast ablation pit parameters
View tableView in ArticleTable 3. Contrast ablation pit parameters
Ablation pit parameters Volume/µm3 Quality/µg Ideal frustum of a cone 6.27×106 10.03 Reconstruction of ablation pits 5.34×106 8.544
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Wei Guo, Hao Chang, Bangdeng Du, Chenghao Yu. Estimation method of laser micro-scale ablation quality based on image[J]. Infrared and Laser Engineering, 2021, 50(S2): 20210297
Paper Information
Category: Lasers and laser optics
Received: May. 7, 2021
Accepted: --
Published Online: Dec. 3, 2021
The Author Email: Chang Hao (changhao5976911@163.com)
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