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Opto-Electronic Engineering, Volume. 50, Issue 3, 220133(2023)

High-speed two-photon lithography based on femtosecond laser

Shunhua Yang1... Chenliang Ding1,*, Dazhao Zhu1, Zhenyao Yang1, Yong Liu1,3, Cuifang Kuang1,2,4,**, and Xu Liu12 |Show fewer author(s)
Author Affiliations
  • 1Research Center for Intelligent Chips and Devices, Zhejiang Lab, Hangzhou, Zhejiang 311121, China
  • 2State Key Laboratory of Extreme Photonics and Instrumentation, College of Optical Science and Engineering, Zhejiang University, Hangzhou, Zhejiang 310027, China
  • 3College of Electronics and Information Engineering, Shanghai University of Electric Power, Shanghai 200090, China
  • 4ZJU-Hangzhou Global Scientific and Technological Innovation Center, Hangzhou, Zhejiang 311200, China
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    [8] [8] Baldacchini T. Three-Dimensional Microfabrication Using Two-Photon Polymerization[M]. 2nd ed. Norwich: William Andrew, 2020.

    [16] [16] Sanli U T, Messer T, Weigand M, et al. High-resolution kinoform X-ray optics printed via 405 nm 3D laser lithography[J]. Adv Mater Technol, 2022,doi: 10.1002/admt.202101695.

    [43] [43] Tang J B. Three dimensional confocal imaging based on beam scanning technology[D]. Harbin: Harbin Institute of Technology, 2011.

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    Shunhua Yang, Chenliang Ding, Dazhao Zhu, Zhenyao Yang, Yong Liu, Cuifang Kuang, Xu Liu. High-speed two-photon lithography based on femtosecond laser[J]. Opto-Electronic Engineering, 2023, 50(3): 220133

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    Paper Information

    Category: Article

    Received: Jun. 19, 2022

    Accepted: Aug. 9, 2022

    Published Online: May. 4, 2023

    The Author Email: Ding Chenliang (;), Kuang Cuifang (;)

    DOI:10.12086/oee.2023.220133

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology