Opto-Electronic Engineering, Volume. 50, Issue 3, 220133(2023)

High-speed two-photon lithography based on femtosecond laser

Shunhua Yang1... Chenliang Ding1,*, Dazhao Zhu1, Zhenyao Yang1, Yong Liu1,3, Cuifang Kuang1,2,4,**, and Xu Liu12 |Show fewer author(s)
Author Affiliations
  • 1Research Center for Intelligent Chips and Devices, Zhejiang Lab, Hangzhou, Zhejiang 311121, China
  • 2State Key Laboratory of Extreme Photonics and Instrumentation, College of Optical Science and Engineering, Zhejiang University, Hangzhou, Zhejiang 310027, China
  • 3College of Electronics and Information Engineering, Shanghai University of Electric Power, Shanghai 200090, China
  • 4ZJU-Hangzhou Global Scientific and Technological Innovation Center, Hangzhou, Zhejiang 311200, China
  • show less

    Two-photon polymerization (TPP) based on femtosecond laser has been a research hotspot in 3D micro/nano writing technology. With the increasing demand for processing complex and large-scale miniaturized 3D devices in the fields of life science, material engineering, micro and nano optics, and etc., the issue of low processing efficiency of TPP is becoming increasingly serious. During the long fabrication period, many disturbances can be introduced in the processing, causing the quality deterioration of the structure and seriously hindering the further popularization and application of these crucial 3D devices. This paper respectively compares the four approaches of single-beam writing, parallel multi-beam writing, pattern projection, and 3D projection exposure based on the TPP lithography efficiency. Moreover, the researches on the optical design of system, the writing accuracy, the fabrication throughput, the writing strategy, and etc. of each approach are also described. And the advantages and disadvantages of these four methods are summerized simultaneously. Finally, we also made a brief prospect to the developing trend of TPL efficiency improvement in the future.

    Tools

    Get Citation

    Copy Citation Text

    Shunhua Yang, Chenliang Ding, Dazhao Zhu, Zhenyao Yang, Yong Liu, Cuifang Kuang, Xu Liu. High-speed two-photon lithography based on femtosecond laser[J]. Opto-Electronic Engineering, 2023, 50(3): 220133

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Category: Article

    Received: Jun. 19, 2022

    Accepted: Aug. 9, 2022

    Published Online: May. 4, 2023

    The Author Email: Ding Chenliang (;), Kuang Cuifang (;)

    DOI:10.12086/oee.2023.220133

    Topics