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Acta Optica Sinica, Volume. 20, Issue 4, 518(2000)

Fine Correction of Optical Proximity Effect by Using Gray-Tone Coding Mask

[in Chinese]1, [in Chinese]1, [in Chinese]1, [in Chinese]1, [in Chinese]2, [in Chinese]3, and [in Chinese]4
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
  • 3Central Microstructure Facility, Rutherford Appleton Laboratory, Chilton, Didcot, OX11 0QX, UK
  • 4[in Chinese]
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    [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Fine Correction of Optical Proximity Effect by Using Gray-Tone Coding Mask[J]. Acta Optica Sinica, 2000, 20(4): 518

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    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: Nov. 9, 1998

    Accepted: --

    Published Online: Aug. 9, 2006

    The Author Email:

    DOI:

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology