Acta Optica Sinica, Volume. 20, Issue 4, 518(2000)
Fine Correction of Optical Proximity Effect by Using Gray-Tone Coding Mask
A new method has been proposed to realize fine optical proximity correction (OPC) with gray-tone coding mask instead of gray-tone mask. The advantages of the new method are analyzed. The coding rules of the gray-tone coding mask and the relationships between the gray-tone coding mask and gray-tone mask have been discussed. OPC simulation results are given with the gray-tone coding mask and the synthesis area deviation of aerial image drops 10% after OPC.
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[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Fine Correction of Optical Proximity Effect by Using Gray-Tone Coding Mask[J]. Acta Optica Sinica, 2000, 20(4): 518
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