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Photonics Research, Volume. 12, Issue 2, 341(2024)

Optical colorimetric LiTaO3 wafers for high-precision lithography on frequency control of SAW devices

Ming Hui Fang1,2、†, Yinong Xie1、†, Fangqi Xue1, Zhilin Wu1, Jun Shi2, Sheng Yu Yang2, Yilin Liu2, Zhihuang Liu2, Hsin Chi Wang2, Fajun Li1, Qing Huo Liu1,3, and Jinfeng Zhu1、*
Author Affiliations
  • 1School of Electronic Science and Engineering, Xiamen University, Xiamen 361005, China
  • 2Quanzhou San’an Integrated Circuit Co., Ltd., Quanzhou 362300, China
  • 3Eastern Institute of Technology, Ningbo 315200, China
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    Ming Hui Fang, Yinong Xie, Fangqi Xue, Zhilin Wu, Jun Shi, Sheng Yu Yang, Yilin Liu, Zhihuang Liu, Hsin Chi Wang, Fajun Li, Qing Huo Liu, Jinfeng Zhu. Optical colorimetric LiTaO3 wafers for high-precision lithography on frequency control of SAW devices[J]. Photonics Research, 2024, 12(2): 341

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    Paper Information

    Category: Instrumentation and Measurements

    Received: Jul. 6, 2023

    Accepted: Dec. 21, 2023

    Published Online: Feb. 2, 2024

    The Author Email: Jinfeng Zhu (nanoantenna@hotmail.com)

    DOI:10.1364/PRJ.499795

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology