Laser & Optoelectronics Progress, Volume. 50, Issue 5, 51402(2013)
Investigation and Application of Coaxial Output Three-Wavelength Picosecond Laser Micro-Machining System
[1] [1] P. Dupriez, J. K. Sahu, A. Malinowski et al.. 80 W green laser base on a frequency-double picoseconds, single-mode, linearly-polarized fiber laser[C]. Washington, D. C., CLEO, 2006. CThJ1
[3] [3] G. Dumitru, V. Romano, H. P. Weber. Femtosecond ablation of ultrahard materials[J]. Appl. Phys. A, 2002, 74(6): 729~739
[4] [4] M. Meunier, B. Fisette, A. Houle et al.. Processing of metals and semiconductors by a femtosecond laser-based microfabrication system[C]. SPIE, 2003, 4978: 1~11
[6] [6] D. Von der Linde, K. S. Tinten, J. Bialkowski. Laser-solid interaction in the femtosecond time regime[J]. Appl. Surf. Sci., 1997, 109-110: 1~10
[7] [7] F. Dausinger, H. Hügel, V. Konov. Micromachining with ultrashort laser pulses: from basic understanding to technical applications[C]. SPIE, 2003, 5147: 106~115
[8] [8] Xiong Zhimin, Zhang Panzheng, Fan Wei et al.. Heat affection of picosecond laser irradiation with different widths on the dielectric film damage ablation[J]. Chinese J. Lasers, 2012, 39(8): 0803005
[15] [15] Satoshi Kawata, Sun Hongbo, Tomokazu Tanaka et al.. Finer features for functional microdevices[J]. Nature, 2001, 412(6848): 697~698
[16] [16] J. Ihlemann. Excimer lasers ablation of fused silica[J]. Appl. Surf. Sci., 1992, 54: 193~200
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Liu Yang, Yu Jin, Zhang Xue, Mo Zeqiang, Nie Shuzhen, Huang Yutao, Fan Zhongwei, Chen Bo. Investigation and Application of Coaxial Output Three-Wavelength Picosecond Laser Micro-Machining System[J]. Laser & Optoelectronics Progress, 2013, 50(5): 51402
Category: Lasers and Laser Optics
Received: Jan. 9, 2013
Accepted: --
Published Online: Apr. 9, 2013
The Author Email: Yang Liu (lyang@aoe.ac.cn)