Laser & Optoelectronics Progress, Volume. 50, Issue 5, 51402(2013)

Investigation and Application of Coaxial Output Three-Wavelength Picosecond Laser Micro-Machining System

Liu Yang1,2、*, Yu Jin1, Zhang Xue1, Mo Zeqiang1,2, Nie Shuzhen1, Huang Yutao1, Fan Zhongwei1,3, and Chen Bo4
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
  • 3[in Chinese]
  • 4[in Chinese]
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    In order to satisfy micro-machining requirements of different materials, a coaxial output three-wavelength picosecond laser micro-machining system is designed with three-wavelength picosecond laser, self-designed optics system and control system. This system can use any one, two or three of the laser wavelengths to process at the same working distance. Through the axial chromatic aberration compensation design, the maximum distance of axial focus compensation is 0.4 mm, and the diameter of the minimum focal spot is 3 μm. With this system,the experiments of cutting copper electrode plates and mobile phone screen and fabricating graphics for position-sensitive anode detector have been carried out. Experiments show that the system can satisfy the micro-machining requirements of many materials.

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    Liu Yang, Yu Jin, Zhang Xue, Mo Zeqiang, Nie Shuzhen, Huang Yutao, Fan Zhongwei, Chen Bo. Investigation and Application of Coaxial Output Three-Wavelength Picosecond Laser Micro-Machining System[J]. Laser & Optoelectronics Progress, 2013, 50(5): 51402

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    Paper Information

    Category: Lasers and Laser Optics

    Received: Jan. 9, 2013

    Accepted: --

    Published Online: Apr. 9, 2013

    The Author Email: Yang Liu (lyang@aoe.ac.cn)

    DOI:10.3788/lop50.051402

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