Optics and Precision Engineering, Volume. 19, Issue 11, 2724(2011)

Time/pressure pL micro-bonding technology

SHI Ya-li*... ZHANG Wen-sheng, XU De, ZHANG Zheng-tao and ZHANG Juan |Show fewer author(s)
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    References(10)

    [1] [1] MA W M, HESSELBACH J, HUAN J. Experimental study on assembling a micro step motor using adhesive bonding technology[J]. China Mechanical Engineering, 2007, 18(9):1024-1027. (in Chinese)

    [2] [2] DING ZH R, TAO K, DENG G L. Fluid jet-dispenser control system based on AT89C52 single-chip microcomputer[J]. Manufacturing Automation, 2010, 32(3):48-49. (in Chinese)

    [3] [3] ZHAO Y X, CHEN X D, CHEN X. An overview of fluid dispensing technology for micro-electronics packaging[J]. Chinese Hydraulics & Pneumatics, 2006, 2:52-54. (in Chinese)

    [4] [4] HONG B, WANG M H, CAO J J, et al.. Research progresses of quantitative dispensing technology[J]. Microcomputer & Its Applications, 2009, 16:1-6. (in Chinese)

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    CLP Journals

    [1] SHI Ya-li, LI Fu-dong, YANG Xin, ZHANG Zheng-tao, XU De. pL class adhesive dispensing approach for micro bonding[J]. Optics and Precision Engineering, 2012, 20(12): 2744

    [2] ZHANG Qin, YE Si-lun, LUO Kai, XU Ce. Development and application on hole-sealing of pL ultra-micro dispenser[J]. Optics and Precision Engineering, 2020, 28(5): 1132

    [3] FAN Zeng-hua, RONG Wei-bin, WANG Le-feng, SUN Li-ning. Control and experiment of micro-dispenser by piezoelectric drive[J]. Optics and Precision Engineering, 2016, 24(5): 1042

    [4] ZHANG Qin, XU Ce, XU Chen-ying, AOYAMA Hisayuki. Approach and experiment of ultra-micro dispensing[J]. Optics and Precision Engineering, 2013, 21(8): 2071

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    SHI Ya-li, ZHANG Wen-sheng, XU De, ZHANG Zheng-tao, ZHANG Juan. Time/pressure pL micro-bonding technology[J]. Optics and Precision Engineering, 2011, 19(11): 2724

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    Paper Information

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    Received: May. 4, 2011

    Accepted: --

    Published Online: Dec. 5, 2011

    The Author Email: Ya-li SHI (shiyali0825@126.com)

    DOI:10.3788/ope.20111911.2724

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