Acta Photonica Sinica, Volume. 51, Issue 9, 0912001(2022)
Signal Processing for Height Measurement of High-aspect-ratio Structure Based on Low-coherence Interferometry
Figures & Tables(9)
Fig. 1. System of Linnik-type low-coherence scanning interferometry
Fig. 2. Structural parameters of the measurement sample and the location of the sampling point
Fig. 3. Original coherence signals of eight sampling points in Fig. 2
Fig. 5. Pre-processed coherence signals of eight sampling points in Fig. 2 （The dotted line is the signal envelope）
Fig. 7. Binarization result combining contrast and intensity information
Table 1. Measurement result of the high-aspect-ratio trench
View tableView in ArticleTable 1. Measurement result of the high-aspect-ratio trench
Number 1 2 3 4 5 6 7 8 9 10 Result/μm 101.235 101.003 101.587 101.296 101.198 100.458 101.263 101.212 100.834 100.846 Mean value/μm 101.093 Standard deviation/μm 0.316 Absolute error/μm 0.677 Relative error/% 0.67%
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Yifeng SUN, Zhishan GAO, Xiaoxin FAN, Jiale ZHANG, Jianqiu MA, Qun YUAN. Signal Processing for Height Measurement of High-aspect-ratio Structure Based on Low-coherence Interferometry[J]. Acta Photonica Sinica, 2022, 51(9): 0912001
Paper Information
Category: Instrumentation, Measurement and Metrology
Received: Jan. 25, 2022
Accepted: Apr. 21, 2022
Published Online: Oct. 26, 2022
The Author Email: SUN Yifeng (807675530@qq.com)
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