Low temperature sensitivity on-chip Fourier-transform spectrometer based on dual-layer Si<sub>3</sub>N<sub>4</sub> spiral waveguides

Liangjun Lu; Hongyi Zhang; Xin Li; Jianping Chen; Linjie Zhou

doi:10.1364/PRJ.483540

Photonics Research, Volume. 11, Issue 4, 591(2023)

Low temperature sensitivity on-chip Fourier-transform spectrometer based on dual-layer Si₃N₄ spiral waveguides

Liangjun Lu^1,2、†,*, Hongyi Zhang^1、†, Xin Li¹, Jianping Chen^1,2, and Linjie Zhou^1,2

¹State Key Laboratory of Advanced Optical Communication Systems and Networks, Shanghai Key Laboratory of Navigation and Location Services, Department of Electronic Engineering, Shanghai Jiao Tong University, Shanghai 200240, China

²SJTU-Pinghu Institute of Intelligent Optoelectronics, Pinghu 314200, China

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Liangjun Lu, Hongyi Zhang, Xin Li, Jianping Chen, Linjie Zhou. Low temperature sensitivity on-chip Fourier-transform spectrometer based on dual-layer Si₃N₄ spiral waveguides[J]. Photonics Research, 2023, 11(4): 591

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Paper Information

Category: Silicon Photonics

Received: Dec. 13, 2022

Accepted: Feb. 11, 2023

Published Online: Mar. 24, 2023

The Author Email: Liangjun Lu (luliangjun@sjtu.edu.cn)

DOI:10.1364/PRJ.483540

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology