Infrared and Laser Engineering, Volume. 51, Issue 9, 20220157(2022)

Adaptive cyclic compensation structure used in freeform surface interferometric testing

Renhu Liu1,2, Jinling Wu1,2, Jiaquan Cao1,2, Shengyang Wu1,2, Sheng Zhou1,2, Benli Yu1,2, and Lei Zhang1,2
Author Affiliations
  • 1Information Materials and Intelligent Sensing Laboratory of Anhui Province, Anhui University, Hefei 230601, China
  • 2Key Laboratory of Opto-Electronic Information Acquisition and Manipulation , Ministry of Education, Anhui University, Hefei 230601, China
  • show less
    Figures & Tables(10)
    Principle of adaptive interferometer. (a) ARCC-based adaptive interferometer; (b) TSRC-based adaptive interferometer
    Astigmatism compensation capacity of the TSRC and ARCC. (a) Compensation astigmatism X; (b) Compensation astigmatism Y
    Coma compensation capacity of the TSRC and ARCC. (a) Compensation coma X; (b) Compensation coma Y
    Spherical aberration compensation capacity of the TSRC and ARCC
    DM surface figure in ARCC and TSRC,and the aperture is normalized. (a)-(e) DM surface figure in ARCC that can compensate astigmatism X, astigmatism Y, coma X, coma Y and spherical aberration with 1respectively; (f)-(j) DM surface figure in TSRC that can compensate astigmatism X, astigmatism Y, coma X, coma Y and spherical aberration with 1respectivelyARCC和 TSRC两种补偿结构中的DM面形(口径为归一化的)。(a)~(e)分别为利用ARCC补偿大小均为1的X像散、Y像散、X彗差、Y彗差所需的DM像差分布;(f)~(j)分别为利用TSRC补偿大小均为1的X像散、Y像散、X彗差、Y彗差和球差所需的DM的像差分布
    DM deformation(PV) required by ARCC and TSRC respectively when compensating for 1single aberrationARCC与TSRC补偿被测面1低阶像差所需的DM形变量(PV)
    Experiment device
    Interferograms of 1#-4# freeform. (a), (d), (g), (j) are the initial interferograms when testing the 1#, 2#, 3# and 4# freeform surface without aberration compensation, respectively; (b), (c) are the interferograms of 1# freeform when compensated by TSRC and ARCC respectively under the same DM stroke; (e), (f) are the interferograms of 2# freeform when compensated by TSRC and ARCC respectively under the same DM stroke; (h), (i) are the interferograms of 3# freeform when compensated by TSRC and ARCC respectively under the same DM stroke; (k), (l) are the interferograms of 4# freeform when compensated by TSRC and ARCC respectively under the same DM stroke
    • Table 1. Range of the each low-order aberration on the DM surface in simulation (Unit: λ)

      View table
      View in Article

      Table 1. Range of the each low-order aberration on the DM surface in simulation (Unit: λ)

      Aberration typesAstigmatism XAstigmatism YComa XComa YSpherical aberration
      Range[−24, 28][−33, 33][−23, 23][−16, 16][−10, 10]
    • Table 2. Ratio of low-order aberration compensation between ARCC and TSRC

      View table
      View in Article

      Table 2. Ratio of low-order aberration compensation between ARCC and TSRC

      Low-order aberration Astigmatism XAstigmatism YComa XComa YSpherical aberration
      $ {\kappa _A}/{\kappa _T} $2.0062.0071.9912.005-
    Tools

    Get Citation

    Copy Citation Text

    Renhu Liu, Jinling Wu, Jiaquan Cao, Shengyang Wu, Sheng Zhou, Benli Yu, Lei Zhang. Adaptive cyclic compensation structure used in freeform surface interferometric testing[J]. Infrared and Laser Engineering, 2022, 51(9): 20220157

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Category: Special issue—Ultra precision manufacture and testing technology of optical aspheric surface

    Received: Apr. 10, 2022

    Accepted: --

    Published Online: Jan. 6, 2023

    The Author Email:

    DOI:10.3788/IRLA20220157

    Topics