Infrared and Laser Engineering, Volume. 51, Issue 9, 20220157(2022)
Adaptive cyclic compensation structure used in freeform surface interferometric testing
Fig. 1. Principle of adaptive interferometer. (a) ARCC-based adaptive interferometer; (b) TSRC-based adaptive interferometer
Fig. 2. Astigmatism compensation capacity of the TSRC and ARCC. (a) Compensation astigmatism
Fig. 3. Coma compensation capacity of the TSRC and ARCC. (a) Compensation coma
Fig. 4. Spherical aberration compensation capacity of the TSRC and ARCC
Fig. 5. DM surface figure in ARCC and TSRC,and the aperture is normalized. (a)-(e) DM surface figure in ARCC that can compensate astigmatism
Fig. 6. DM deformation(PV) required by ARCC and TSRC respectively when compensating for 1 single aberration ARCC与TSRC补偿被测面1 低阶像差所需的DM形变量(PV)
Fig. 7. Experiment device
Fig. 8. Interferograms of 1#-4# freeform. (a), (d), (g), (j) are the initial interferograms when testing the 1#, 2#, 3# and 4# freeform surface without aberration compensation, respectively; (b), (c) are the interferograms of 1# freeform when compensated by TSRC and ARCC respectively under the same DM stroke; (e), (f) are the interferograms of 2# freeform when compensated by TSRC and ARCC respectively under the same DM stroke; (h), (i) are the interferograms of 3# freeform when compensated by TSRC and ARCC respectively under the same DM stroke; (k), (l) are the interferograms of 4# freeform when compensated by TSRC and ARCC respectively under the same DM stroke
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Renhu Liu, Jinling Wu, Jiaquan Cao, Shengyang Wu, Sheng Zhou, Benli Yu, Lei Zhang. Adaptive cyclic compensation structure used in freeform surface interferometric testing[J]. Infrared and Laser Engineering, 2022, 51(9): 20220157
Category: Special issue—Ultra precision manufacture and testing technology of optical aspheric surface
Received: Apr. 10, 2022
Accepted: --
Published Online: Jan. 6, 2023
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