Infrared and Laser Engineering, Volume. 51, Issue 9, 20220157(2022)

Adaptive cyclic compensation structure used in freeform surface interferometric testing

Renhu Liu1,2, Jinling Wu1,2, Jiaquan Cao1,2, Shengyang Wu1,2, Sheng Zhou1,2, Benli Yu1,2, and Lei Zhang1,2
Author Affiliations
  • 1Information Materials and Intelligent Sensing Laboratory of Anhui Province, Anhui University, Hefei 230601, China
  • 2Key Laboratory of Opto-Electronic Information Acquisition and Manipulation , Ministry of Education, Anhui University, Hefei 230601, China
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    In order to alleviate the inherent contradiction of existing deformable mirror (DM)-based adaptive freeform surface interferometers, which can not take into account both large departure coverage and DM surface monitoring, therefore, adaptive ring-cavity compensator (ARCC) was proposed, which can generate large departure wavefront using DM deformation multiple times, and it had been preliminarily verified. Considering the practical application of ARCC and the fact that most freeform surfaces in optical systems were low-order aberration surfaces, the low-order aberration compensation characteristics of ARCC were verified and studied. Firstly, the compensation capability of ARCC and TSRC (traditional single round compensator) for astigmatism, coma and spherical aberration was compared by Zemax modeling. It was concluded that the ability of ARCC to compensate astigmatism and coma were about twice that of TSRC, and the ability of ARCC to compensate spherical aberration was also significantly greater than TSRC, which verified the advantage of ARCC in low-order aberration compensation; Secondly, the low-order aberration compensation of ARCC was studied, and it was include that the aberration types on DM in ARCC structure was one-to-many or many-to-one with the aberration types compensated to the tested surface. The results show that in practice, four low-order aberration free-form surfaces are compensated and verified by using ARCC and TSRC respectively. Under the same DM stroke variable, ARCC shows more excellent low-order aberration compensation ability than the TSRC.

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    Renhu Liu, Jinling Wu, Jiaquan Cao, Shengyang Wu, Sheng Zhou, Benli Yu, Lei Zhang. Adaptive cyclic compensation structure used in freeform surface interferometric testing[J]. Infrared and Laser Engineering, 2022, 51(9): 20220157

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    Paper Information

    Category: Special issue—Ultra precision manufacture and testing technology of optical aspheric surface

    Received: Apr. 10, 2022

    Accepted: --

    Published Online: Jan. 6, 2023

    The Author Email:

    DOI:10.3788/IRLA20220157

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