Laser & Optoelectronics Progress, Volume. 55, Issue 4, 040201(2018)
Fabrication and Study of Micro Alkali-Metal Vapor Cell Applied to Chip Scale Atomic Clock
Fig. 1. Diagram of ICP etching system
Fig. 1. [in Chinese]
Fig. 2. Deep silicon etching machine. (a) Picture; (b) schematic of inside
Fig. 3. Structures to be etched
Fig. 4. Flow chart of etching process
Fig. 5. Relationship between etching loop number and etching depth
Fig. 6. 3D schematic of silicon pore structure
Fig. 7. Schematic of etching results
Fig. 8. Picture of bonded alkali-metal vapor cell
Fig. 9. Schematic of experimental principle for saturated absorption
Fig. 10. Saturated absorption of micro alkali-metal vapor cell under different temperatures. (a) 50 ℃; (b) 60 ℃; (c) 70 ℃; (d) 80 ℃
Fig. 11. (a) Schematic of D2 line transition in 87Rb atom; (b) saturated absorption curve of MEMS vapor cell at 80 ℃
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Yue Tang, Ziming Ren, Yunchao Li, Xuwen Hu, Yanjun Zhang, Shubin Yan. Fabrication and Study of Micro Alkali-Metal Vapor Cell Applied to Chip Scale Atomic Clock[J]. Laser & Optoelectronics Progress, 2018, 55(4): 040201
Category: Atomic and Molecular Physics
Received: Oct. 26, 2017
Accepted: --
Published Online: Sep. 11, 2018
The Author Email: Yan Shubin (shubin_yan@nuc.edu.cn)